非冷却微热计用La0.7Sr0.3MnO3薄膜热敏电阻8-12 μm的热与光电分析

N. Paul, Sudharshan Vadnala, A. Agrawal, S. Vanjari, Shiv Govind Singh
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引用次数: 1

摘要

La0.7Sr0.3MnO3作为一种传感材料,在非制冷热成像领域显示出惊人的应用潜力。本文报道了在硅片上制备La0.7Sr0.3MnO3 (LSMO)薄膜热敏电阻,并探讨了电阻温度系数(TCR)和光学响应率这两个主要性能指标,这是与任何热传感器性能比较的非常有用的参数。采用脉冲激光沉积(PLD)技术,在Si/SiO2衬底的SrTiO3(STO)缓冲层上沉积LSMO薄膜。利用x射线衍射仪(XRD)和原子力显微镜(AFM)分析了薄膜的结晶度和表面形貌。然后分析了该装置的热学和电学特性,以验证其作为红外传感器的适用性。当温度从10 K上升到300 K时,该器件在150 K时表现出非常明显的金属-绝缘体相变温度,在100 K和200 K附近,TCR分别为+4% K−1和- 4%K−1。制作的热敏电阻在红外光(150w)交替开关周期下显示出非常好的热响应和恢复,证实了其适用于高速热成像应用。实验分析表明,在8.5 μm处的响应率最高,为$\sim 21085$ V/W,处于长波红外(LWIR)区域,是任何热成像应用的理想红外波段。
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Thermal and Optoelectrical Analysis of La0.7Sr0.3MnO3 Thin Film Thermistor in 8–12 μm Range for Uncooled Microbolometer Application
La0.7Sr0.3MnO3 as a sensing material has shown an amazing potential for uncooled thermal imaging application. Here we report the fabrication of a La0.7Sr0.3MnO3 (LSMO) thin film thermistor on a Si wafer and explored two prime figure-of-merit such as temperature coefficient of resistance (TCR) and optical responsivity, which are very useful parameters to compare the performance with any thermal sensor. The LSMO films were deposited on a SrTiO3(STO) buffer layer with Si/SiO2 as a substrate, by a pulsed laser deposition (PLD) technique. The crystallinity and surface topography of the films were analyzed by X-ray diffraction (XRD) and atomic force microscopy (AFM). The fabricated device was then analyzed for its thermal and electrical characteristics to validate its suitability as an IR sensor. The fabricated device shows very sharp metal-to-insulator (TMI) phase transition temperature at 150 K and very high TCR of +4% K−1 and −4%K−1near 100 K and 200 K respectively, when the temperature was sweeped from 10 K to 300 K. Fabricated Thermistor shows very good thermal response and recovery when subjected to an alternating on-off cycle of IR lamp (150 W) illumination, which confirms its suitability for the highspeed thermal imaging application. The experimental analysis shows highest responsivity of $\sim 21085$ V/W at 8.5 μm, which falls in the Long-Wave Infrared (LWIR) region, which is an ideal IR band for any thermal imaging application.
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