用于超灵敏生物传感器的垂直应变SiGe冲击电离MOSFET的表征

I. Saad, H. M. Zuhir, C. B. Seng, A. M. Khairul, B. Ghosh, N. Bolong, R. Ismail
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引用次数: 1

摘要

本文通过评估将垂直冲击电离MOSFET (IMOS)与应变SiGe技术结合起来,形成一种具有更高性能和可靠结果的新兴器件结构,为未来的生物基传感器应用提供了可行的纳米电子器件设计解决方案。冲击电离效应场效应管生物传感器在需要超高灵敏度和快速响应的应用中非常有前途。超低功耗、低亚阈值摆幅和高击穿电压是超灵敏生物传感器的必要条件。冲击电离MOSFET (IMOS)的亚阈值摆幅(S)有望降至20 mV/dec,这比传统的MOSFET (CMOS)要低得多。这将最终增强晶体管的开关行为,并提高其电气性能和响应时间,特别是当缩小到纳米级时。然而,垂直IMOS具有寄生双极晶体管(PBT)效应和低击穿电压。寄生双极晶体管效应是指MOSFET充当像BJT一样的少数载流子器件而不是多数载流子器件的现象。这对任何动力装置或传感器都是不利的。介电袋(DP)被认为能够最大限度地减少PBT效应,同时提高器件的性能。最终,该装置将延长晶体管密度的增加,为未来生物传感器纳米电子学的应用奠定基础。
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Characterization of vertical strained SiGe impact ionization MOSFET for ultra-sensitive biosensor application
This paper venture into prospective ideas of finding viable solution of nanoelectronics device design by an assessment of incorporating vertical impact-ionization MOSFET (IMOS) with strained SiGe technology into a formation of an emerging device structure with elevated performance and reliable outcomes for future bio-based sensor application. Impact Ionization FET biosensors can be extremely promising for applications where ultra-high sensitivity and fast response is desirable. An ultra-low power with low Subthreshold Swing and high breakdown voltage are imperative for ultra-sensitive biosensor. Impact ionization MOSFET (IMOS) is expected to have a subthreshold swing (S) down to 20 mV/dec which is much lower compared to Conventional MOSFET (CMOS). This will eventually enhanced the switching behavior of the transistor and enhancing its electrical performance and response time particularly when scaled down into nanometre regime. However, vertical IMOS experience parasitic bipolar transistors (PBT) effect and low breakdown voltage. Parasitic Bipolar Transistor effect is a phenomenon where the MOSFET act as a minority carrier device like BJT instead of majority carrier device. This is not favorable for any power device or sensor. Dielectric Pocket (DP) is believed to be able to minimize the PBT effect while improving the performance of the device. Eventually, this device will prolong the increase density of transistor in a chip for future application of biosensor nanoelectronics.
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