锗N-和P- mosfet的蒙特卡罗研究

B. Ghosh, Xiao-Feng Fan, L. Register, S. Banerjee
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引用次数: 2

摘要

随着器件尺寸被扩展到极限,通道迁移工程似乎为改善金属氧化物半导体场效应晶体管(mosfet)的性能提供了最好的前景之一。事实上,新材料,如Ge,具有比Si更高的有效电子迁移率(2倍)和空穴(4倍),已经在探索中,以增加mosfet中的驱动电流。此外,通过拉伸锗通道,可以进一步增加孔的迁移率。然而,这种迁移率的优势如何转化为短沟道长度mosfet中改进的驱动电流尚不完全清楚。例如,在弹道极限,它是热速度的问题(Lundstrom, 1997),这些是相当的硅和锗。虽然,已经有一些实验和理论(在弹道极限下)研究非应变和应变Ge沟道mosfet比Si mosfet的迁移率和驱动电流增强的报道,但到目前为止还没有考虑全带结构,散射,非局部场效应等的蒙特卡罗模拟。本研究的目的是对非应变Ge块体N-和P- mosfet以及应变Ge块体pmosfet进行全波段蒙特卡罗模拟研究,并与它们的Si对应物进行比较。由于沿Ge(100)平面的双轴应变不会破坏Ge的导带L谷的简并,因此我们没有考虑应变的Ge nmosfet
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Monte carlo study of germanium N- and P- MOSFETs
As device dimensions are being scaled to their ultimate limits, channel mobility engineering seems to offer one of the best prospects of improved performance of metal oxide semiconductor field effect transistors (MOSFETs). In fact, new materials, such as Ge, with higher effective mobilities of electrons (2times) and holes (4times) than in Si are already being explored to increase the drive currents in MOSFETs. In addition, by straining the Ge channels, it is possible to further increase the mobilities of the holes. However, how this advantage in mobility translates to improved drive current in the short-channel length MOSFETs is not completely clear. For example, in the ballistic limit, it is thermal velocity that matters (Lundstrom, 1997) and these are comparable for Si and Ge. Although, there have been reports from some experimental and theoretical (in the ballistic limit) studies of the mobility and drive current enhancements of unstrained and strained Ge channel MOSFETs over Si MOSFETs, no Monte Carlo simulation taking into account full band structure, scattering, non local field effects, etc., has so far been been performed. The aim of this work was to perform a full band Monte Carlo simulation study of unstrained Ge bulk N- and P- MOSFETs and strained Ge bulk PMOSFETs and compare with their Si counterparts. Since biaxial strain along the (100) plane in Ge does not break the degeneracy of the conduction band L valleys of Ge, we have not considered strained Ge NMOSFETs
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