热载流子降解与交流应力波形的关系

K. Cham, H. Fu, Y. Nishi
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引用次数: 7

摘要

研究了不同栅极和漏极脉冲波形下亚微米n沟道场效应管的热载流子衰减特性。结果与热空穴产生的界面电子阱一致。结果表明,由于交流退化效应,负载较小的逆变器比负载较大的逆变器退化速度更快。电路中的器件寿命一般不能用直流数据来预测。交流效应还与器件结构有关。
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The dependence of hot carrier degradation on AC stress waveforms
The hot carrier degradation of submicron n-channel FETs is characterized for various gate and drain pulse waveforms. The results are consistent with interface electron traps generated by hot holes. The results showed that inverters with small loads can degrade faster than inverters with large loads, due to AC degradation effects. Device lifetime in circuits cannot in general be projected by DC data. The AC effect was also found to be dependent on device structure.<>
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