{"title":"聚酰亚胺薄膜的激光烧蚀","authors":"M. Damaceanu, R. Rusu, M. Olaru, M. Brumǎ","doi":"10.1109/SMICND.2010.5650460","DOIUrl":null,"url":null,"abstract":"Thin films made from fluorinated poly(naphthyl-imide)s containing oxadiazole rings were irradiated with UV-laser of various fluences and their morphology before and after laser ablation was investigated by using various spectroscopy techniques such as FTIR, atom force, and time-resolved emission spectroscopy.","PeriodicalId":377326,"journal":{"name":"CAS 2010 Proceedings (International Semiconductor Conference)","volume":"11 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2010-12-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":"{\"title\":\"Laser ablation of polyimide thin films\",\"authors\":\"M. Damaceanu, R. Rusu, M. Olaru, M. Brumǎ\",\"doi\":\"10.1109/SMICND.2010.5650460\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Thin films made from fluorinated poly(naphthyl-imide)s containing oxadiazole rings were irradiated with UV-laser of various fluences and their morphology before and after laser ablation was investigated by using various spectroscopy techniques such as FTIR, atom force, and time-resolved emission spectroscopy.\",\"PeriodicalId\":377326,\"journal\":{\"name\":\"CAS 2010 Proceedings (International Semiconductor Conference)\",\"volume\":\"11 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2010-12-03\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"2\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"CAS 2010 Proceedings (International Semiconductor Conference)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/SMICND.2010.5650460\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"CAS 2010 Proceedings (International Semiconductor Conference)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SMICND.2010.5650460","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Thin films made from fluorinated poly(naphthyl-imide)s containing oxadiazole rings were irradiated with UV-laser of various fluences and their morphology before and after laser ablation was investigated by using various spectroscopy techniques such as FTIR, atom force, and time-resolved emission spectroscopy.
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