K. Hung, Ying-Chuan Chen, Shih-Hao Huang, Y. Chuang
{"title":"一种具有光学表面粗糙度的微立方体分束器制造新方法","authors":"K. Hung, Ying-Chuan Chen, Shih-Hao Huang, Y. Chuang","doi":"10.1109/OMEMS.2010.5672145","DOIUrl":null,"url":null,"abstract":"This paper successfully used inclined exposure technology to fabricate 50/50 3D micro cube beam splitter with 45° optical grade surface (∼1.4 mm thick). This paper tests the effect of solvent loss percentage of the polymer material (optimum surface roughness: 85.45% solvent remove) on the surface roughness of inclined surfaces. The smallest surface roughness achieved in the experiments using SU-8 material with a thickness of 1.4 mm was less than 70 nm (400μm × 400μm area). This type of micro-mirror can be used as a key component in Michelson Interferometer, bio detection systems, data storage system and linear encoder.","PeriodicalId":421895,"journal":{"name":"2010 International Conference on Optical MEMS and Nanophotonics","volume":"23 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2010-12-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"3","resultStr":"{\"title\":\"A novel fabrication method of the micro cube beam-splitter with optical surface roughness\",\"authors\":\"K. Hung, Ying-Chuan Chen, Shih-Hao Huang, Y. Chuang\",\"doi\":\"10.1109/OMEMS.2010.5672145\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This paper successfully used inclined exposure technology to fabricate 50/50 3D micro cube beam splitter with 45° optical grade surface (∼1.4 mm thick). This paper tests the effect of solvent loss percentage of the polymer material (optimum surface roughness: 85.45% solvent remove) on the surface roughness of inclined surfaces. The smallest surface roughness achieved in the experiments using SU-8 material with a thickness of 1.4 mm was less than 70 nm (400μm × 400μm area). This type of micro-mirror can be used as a key component in Michelson Interferometer, bio detection systems, data storage system and linear encoder.\",\"PeriodicalId\":421895,\"journal\":{\"name\":\"2010 International Conference on Optical MEMS and Nanophotonics\",\"volume\":\"23 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2010-12-17\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"3\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2010 International Conference on Optical MEMS and Nanophotonics\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/OMEMS.2010.5672145\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2010 International Conference on Optical MEMS and Nanophotonics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/OMEMS.2010.5672145","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
A novel fabrication method of the micro cube beam-splitter with optical surface roughness
This paper successfully used inclined exposure technology to fabricate 50/50 3D micro cube beam splitter with 45° optical grade surface (∼1.4 mm thick). This paper tests the effect of solvent loss percentage of the polymer material (optimum surface roughness: 85.45% solvent remove) on the surface roughness of inclined surfaces. The smallest surface roughness achieved in the experiments using SU-8 material with a thickness of 1.4 mm was less than 70 nm (400μm × 400μm area). This type of micro-mirror can be used as a key component in Michelson Interferometer, bio detection systems, data storage system and linear encoder.