基于光学谐振光栅的MEMS悬臂梁高度敏感检测技术

COMMAD 2012 Pub Date : 2012-12-01 DOI:10.1109/COMMAD.2012.6472387

G. Putrino, M. Martyniuk, A. Keating, L. Faraone, J. Dell

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摘要

我们提出了一种集成技术的实验演示，该技术旨在以极高的精度测量微悬臂梁的高度位置。实验结果表明，将光束高度改变200 nm可导致通过底层光波导传输的光功率变化高达40 dB。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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An optically resonant, grating-based technique for the sensitive detection of MEMS cantilever beam height

We present an experimental demonstration of an integrated technique designed to measure the height position of a micro-cantilever with extremely high precision. Our experimental results show that changing the beam height by 200 nm can result in an up to 40 dB change in optical power transmitted through an underlying optical waveguide.

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COMMAD 2012

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