InP/InGaAsP-MQW上带环形谐振器的新型带状EAM

ZhengLin Zhou, Chun Cai, Xiaohan Sun
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引用次数: 0

摘要

PIC芯片是指在同一衬底材料上具有多个功能器件的芯片,对振动、温度等环境因素具有较强的适应性。PIC芯片在光通信节点和终端设备中的应用,可以大大提高设备的性价比,降低设备的体积。本文采用三维时域法作为仿真手段,在InP/InGaAsP-MQW上设计了带环形谐振腔的条形EAM,采用国内先进的半导体外延生长和刻蚀技术制作芯片,并通过了静态测试,结果表明调制器具有明显的电吸收效应,谐振腔的滤波峰值随偏置电压的变化而变化。
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Novel strip EAM with a ring resonator on InP/InGaAsP-MQW
PIC chip refers to the one that has several functional devices based on the same substrate material, which has strong adaptability to environmental factors, such as vibration and temperature. The application of PIC chip in the node and terminal equipment of the optical communication can greatly enhance the equipment's ratio of performance over the price and reduce the volume. In this paper a three-dimension time domain method is employed as simulation instrument to design the strip EAM with a ring resonator on InP/InGaAsP-MQW, and the chip is produced by applying domestically advanced semi-conductor epitaxial growth and etching techniques, and it has passed the static test, which shows that the modulator has obvious electric absorption effects and the filtering peak of the resonator changes with the variation of offset voltage.
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