一种高速高压EPI基极GTO

H. Becke
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引用次数: 3

摘要

讨论了一种8A/600V栅极关断装置的研制及其性能。该结构建立在高电阻率的n型材料上,使用均匀掺杂的门控p基。在同一晶圆上同时加工8个器件的测试阵列;所有几何形状的阴极面积都大致相等。然而,阴极宽度从2密尔到20密尔不等。研究了开关性能。导通时间相对独立于特定的几何形状,而存储时间和下降时间随着阴极指宽的减小而减小。栅极触发电流和正向压降随着阴极宽度的减小而增大。在Tj= 125°C条件下,当IT= 8安培,VD= 200伏特,阴极宽度为4mil时,观察到上升时间为400纳秒,下降时间为140纳秒。
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A high-speed, high-voltage EPI base GTO
The development and performance of an 8A/600V gate turn-off device is discussed. The structure is built on high-resistivity n-type material using a uniformly doped, gated p-base. A test array of 8 devices was simultaneously processed on the same wafer; all geometries had approximately equal cathode areas. The cathode width, however, was varied from 2 mils to 20 mils. Switching performance was investigated. Turn-on time was relatively independent of the particular geometry while storage time and fall time decreased with decreasing cathode-finger width. Gate trigger current and forward voltage drop increased with narrowing cathode width, however. Four-hundred nanoseconds rise time and 140 nanoseconds fall time were observed for IT= 8 amperes and VD= 200 volts at Tj= 125°C with the 4-mil-wide cathode geometry.
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