印刷ZnO纳米粒子种子层,在柔性衬底上生长ZnO纳米线

F. Villani, F. Loffredo, G. Sico, Maria Montanino, Anna De Girolamo Del Mauro, M. F. Caso, Manojit Pusty, T. Jalabert, G. Nenna, G. Ardila
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摘要

氧化锌(ZnO)纳米线由于其压电和半导体特性的相互作用,是制造能量收集器、机械传感器、压电和压电光电子器件的优秀候选者。ZnO纳米晶在柔性衬底上的生长将进一步拓宽其应用前景。然而,这种生长需要低温合成,以防止对柔性聚合物的任何损害。另一个困难在于,在柔性衬底上沉积图案陶瓷薄膜是具有挑战性的,特别是在真空条件下。在这种框架下,喷墨印刷和凹印印刷等印刷技术具有值得注意的潜力,因为它们允许在柔性基材上沉积薄膜,并提供其他一些优势,如成本效益、使用低温、无真空加工、高吞吐量和在沉积过程中形成图案的可能性。本文报道了从喷墨印刷ZnO纳米粒子种子层开始,在聚对苯二甲酸乙二醇酯(PET)上化学浴沉积(CBD)生长高质量ZnO纳米ws,并与凹印技术沉积种子层的结果进行了比较。利用压电响应力显微镜(PFM),我们观察到锌极性畴均匀分布在生长的ZnO NWs的顶表面。这项工作证明了印刷技术比传统方法(例如原子层沉积,ALD)在低温下在柔性基板上沉积种子层的关键优势。这开启了制造完全无真空的基于溶液的柔性压电器件的可能性。
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Printed ZnO nanoparticle seed layers to grow ZnO nanowires on flexible substrates
Zinc oxide (ZnO) nanowires (NWs) are excellent candidates for the fabrication of energy harvesters, mechanical sensors, piezotronic and piezo-phototronic devices thanks to the interplay between piezoelectric and semiconducting properties. The growth of ZnO NWs on flexible substrates would further broaden their possible applications. However, such a growth requires low temperature synthesis to prevent any damage to the flexible polymer. Another difficulty lies in the fact that the deposition of patterned ceramic thin films on flexible substrates is challenging, especially under vacuum free conditions. In this framework, printing technologies like inkjet and gravure printing have a noteworthy potential since they allow to deposit thin films onto flexible substrates and offer several other advantages like cost efficiency, use of low temperatures, vacuum-free processing, high throughput and the possibility of patterning during the deposition process. In this work, we report the chemical bath deposition (CBD) growth of high quality ZnO NWs on polyethylene terephthalate (PET) starting from inkjet printed seed layer constituted of ZnO nanoparticles and a comparison with that obtained with seed layer deposited by gravure technology. Using Piezoresponse Force Microscopy (PFM), we observed that the Zn-polar domains are homogeneously distributed at the top surface of the grown ZnO NWs. This work demonstrates the key benefit of the printing techniques over conventional methods (e.g. Atomic Layer Deposition, ALD) to deposit seed layers at low temperature on flexible substrates. This opens the possibility of manufacturing completely vacuum-free solution-based flexible piezoelectric devices.
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