{"title":"阴极发光的进展:半导体晶圆厂和FA实验室的最新进展","authors":"C. Monachon, M. J. Davies","doi":"10.31399/asm.edfa.2020-4.p028","DOIUrl":null,"url":null,"abstract":"\n This article discusses the basic principles of SEM-based cathodoluminescence (CL) spectroscopy and demonstrates its usefulness in process development, statistical process control, and failure analysis. The technologies where the benefits of CL spectroscopy are most evident are compound semiconductor optoelectronics and high electron mobility transistors as reflected in the application examples.","PeriodicalId":431761,"journal":{"name":"EDFA Technical Articles","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2020-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Advances in Cathodoluminescence: Recent Steps Toward Semiconductor Fabs and FA Labs\",\"authors\":\"C. Monachon, M. J. Davies\",\"doi\":\"10.31399/asm.edfa.2020-4.p028\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\\n This article discusses the basic principles of SEM-based cathodoluminescence (CL) spectroscopy and demonstrates its usefulness in process development, statistical process control, and failure analysis. The technologies where the benefits of CL spectroscopy are most evident are compound semiconductor optoelectronics and high electron mobility transistors as reflected in the application examples.\",\"PeriodicalId\":431761,\"journal\":{\"name\":\"EDFA Technical Articles\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2020-11-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"EDFA Technical Articles\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.31399/asm.edfa.2020-4.p028\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"EDFA Technical Articles","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.31399/asm.edfa.2020-4.p028","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Advances in Cathodoluminescence: Recent Steps Toward Semiconductor Fabs and FA Labs
This article discusses the basic principles of SEM-based cathodoluminescence (CL) spectroscopy and demonstrates its usefulness in process development, statistical process control, and failure analysis. The technologies where the benefits of CL spectroscopy are most evident are compound semiconductor optoelectronics and high electron mobility transistors as reflected in the application examples.