A. Madison, J. Villarrubia, D. Westly, R. Dixson, Craig R. Copeland, John D. Gerling, K. Cochrane, A. Brodie, L. Muray, J. Liddle, S. M. Stavis
{"title":"扫描电镜显示全位移:亚毫弧度倾斜角测量","authors":"A. Madison, J. Villarrubia, D. Westly, R. Dixson, Craig R. Copeland, John D. Gerling, K. Cochrane, A. Brodie, L. Muray, J. Liddle, S. M. Stavis","doi":"10.1117/12.2673963","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":393709,"journal":{"name":"Metrology, Inspection, and Process Control XXXVII","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2023-04-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"A total shift show: submilliradian tilt goniometry in scanning electron microscopy\",\"authors\":\"A. Madison, J. Villarrubia, D. Westly, R. Dixson, Craig R. Copeland, John D. Gerling, K. Cochrane, A. Brodie, L. Muray, J. Liddle, S. M. Stavis\",\"doi\":\"10.1117/12.2673963\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\",\"PeriodicalId\":393709,\"journal\":{\"name\":\"Metrology, Inspection, and Process Control XXXVII\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2023-04-30\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Metrology, Inspection, and Process Control XXXVII\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1117/12.2673963\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Metrology, Inspection, and Process Control XXXVII","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.2673963","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}