{"title":"PLZT薄膜外延生长及其电光性能","authors":"T. Kosaka, D. Fukunaga, K. Uchiyama, T. Shiosaki","doi":"10.1109/ISAF.2007.4393422","DOIUrl":null,"url":null,"abstract":"Epitaxially grown lanthanum-modified lead zirconate titanate (PLZT) thin films were deposited on r-cut sapphire substrates using a sol-gel method. The new deposition processes of methanol treatments brought high quality epitaxial growth of PLZT thin films. This film showed high electro-optic (EO) coefficients that were almost comparable to those of bulk PLZTs. We believe this advanced deposition technique will open the door for the future data communication systems with integrated electro-optic devices.","PeriodicalId":321007,"journal":{"name":"2007 Sixteenth IEEE International Symposium on the Applications of Ferroelectrics","volume":"58 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2007-05-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Epitaxial Growth of PLZT Thin Films and their Electro-Optic Properties\",\"authors\":\"T. Kosaka, D. Fukunaga, K. Uchiyama, T. Shiosaki\",\"doi\":\"10.1109/ISAF.2007.4393422\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Epitaxially grown lanthanum-modified lead zirconate titanate (PLZT) thin films were deposited on r-cut sapphire substrates using a sol-gel method. The new deposition processes of methanol treatments brought high quality epitaxial growth of PLZT thin films. This film showed high electro-optic (EO) coefficients that were almost comparable to those of bulk PLZTs. We believe this advanced deposition technique will open the door for the future data communication systems with integrated electro-optic devices.\",\"PeriodicalId\":321007,\"journal\":{\"name\":\"2007 Sixteenth IEEE International Symposium on the Applications of Ferroelectrics\",\"volume\":\"58 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2007-05-27\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2007 Sixteenth IEEE International Symposium on the Applications of Ferroelectrics\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ISAF.2007.4393422\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2007 Sixteenth IEEE International Symposium on the Applications of Ferroelectrics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ISAF.2007.4393422","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Epitaxial Growth of PLZT Thin Films and their Electro-Optic Properties
Epitaxially grown lanthanum-modified lead zirconate titanate (PLZT) thin films were deposited on r-cut sapphire substrates using a sol-gel method. The new deposition processes of methanol treatments brought high quality epitaxial growth of PLZT thin films. This film showed high electro-optic (EO) coefficients that were almost comparable to those of bulk PLZTs. We believe this advanced deposition technique will open the door for the future data communication systems with integrated electro-optic devices.
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