{"title":"一种两级微杠杆机构的MEMS压电平面内谐振加速度计","authors":"Yixiang Wang, Hong Ding, Xianhao Le, Jin Xie","doi":"10.1109/NEMS.2016.7758289","DOIUrl":null,"url":null,"abstract":"In this paper, we firstly present a MEMS (microelectromechanical systems) piezoelectric in-plane resonant accelerometer with two-stage micro-leverage mechanism. Double ended tuning fork (DETF) resonators are actuated and sensed by piezoelectric transduction with aluminum nitride (AlN). Optimized configuration of DETF resonators and two-stage micro-leverage mechanism are proposed to enhance sensitivity of the resonant accelerometer. The preliminary characterization of the device was tested in a vacuum chamber at the pressure of 4 mTorr. The sensitivity of the device is 28.4Hz/g at the base frequency around 141 kHz (201 ppm/g), which is higher than the previously reported data.","PeriodicalId":150449,"journal":{"name":"2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"85 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2016-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":"{\"title\":\"A MEMS piezoelectric in-plane resonant accelerometer with two-stage micro-leverage mechanism\",\"authors\":\"Yixiang Wang, Hong Ding, Xianhao Le, Jin Xie\",\"doi\":\"10.1109/NEMS.2016.7758289\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In this paper, we firstly present a MEMS (microelectromechanical systems) piezoelectric in-plane resonant accelerometer with two-stage micro-leverage mechanism. Double ended tuning fork (DETF) resonators are actuated and sensed by piezoelectric transduction with aluminum nitride (AlN). Optimized configuration of DETF resonators and two-stage micro-leverage mechanism are proposed to enhance sensitivity of the resonant accelerometer. The preliminary characterization of the device was tested in a vacuum chamber at the pressure of 4 mTorr. The sensitivity of the device is 28.4Hz/g at the base frequency around 141 kHz (201 ppm/g), which is higher than the previously reported data.\",\"PeriodicalId\":150449,\"journal\":{\"name\":\"2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)\",\"volume\":\"85 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2016-04-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"2\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/NEMS.2016.7758289\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/NEMS.2016.7758289","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
A MEMS piezoelectric in-plane resonant accelerometer with two-stage micro-leverage mechanism
In this paper, we firstly present a MEMS (microelectromechanical systems) piezoelectric in-plane resonant accelerometer with two-stage micro-leverage mechanism. Double ended tuning fork (DETF) resonators are actuated and sensed by piezoelectric transduction with aluminum nitride (AlN). Optimized configuration of DETF resonators and two-stage micro-leverage mechanism are proposed to enhance sensitivity of the resonant accelerometer. The preliminary characterization of the device was tested in a vacuum chamber at the pressure of 4 mTorr. The sensitivity of the device is 28.4Hz/g at the base frequency around 141 kHz (201 ppm/g), which is higher than the previously reported data.
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