倒装片底填料和陶瓷覆层的腐蚀/迁移研究

R. Lachance, H. Lavoie, A. Montanari
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引用次数: 8

摘要

温度、湿度和电压(偏置)是众所周知的应力参数组合,它们会激活失效机制并降低微电子封装的可靠性。下面的工作主要集中在这种机制对IBM高容量倒装芯片封装的影响。该封装由氧化铝上的硅倒装芯片和C4增强底填料和封装涂层组成,HAST测试条件为130℃、85%RH和5 V, THB测试条件为85℃、85%RH和5 V。为了获得最能代表制造条件的抽样,选择了两个IBM制造站点来构建和强调部件。在6个月的时间里,以每周6个零件的速度从各自的地点选择零件。结果表明,下覆层环境对金属迁移机制的影响远远超出了产品的生命周期。研究还发现,Cr/Cu/Cr导体线和Pb/Sn C4结构是最容易发生迁移的区域。根据100倍的目测,铜导体在HAST和THB之间迁移的加速因子为86,使用Arrhenius模型得到的活化能(Ea)为1.23 eV。虽然无法计算涉及Pb/Sn位点的加速因子,但在HAST试验中发现了电气故障。破坏机制是Pb在C4球和最近的Cr/Cu/Cr导体线之间的迁移。研究还发现,由于直径较大,具有较大空隙的C4会更早失效。根据最近的一项研究(S. Peck),微电子封装行业的平均Ea已经从大约10年前的0.79 eV发展到今天的0.9 eV。鉴于此,对于阴极到阳极50微米的应用,1.23 ev(铜迁移)的Ea被认为是非常可接受的。
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Corrosion/migration study of flip chip underfill and ceramic overcoating
Temperature, humidity and voltage (bias) represent a well-known combination of stress parameters that activate failure mechanisms and decrease reliability of microelectronic packages. The following work focuses mainly on the impact of such mechanisms on a high volume flip chip package at IBM. This package consists of a silicon flip chip on alumina with C4 enhancement underfill and a package overcoat The test conditions for HAST were 130 C, 85%RH and 5 V, while 85 C, 85% RH and 5 V were used for THB. In order to have a sampling most representative of manufacturing conditions, two IBM manufacturing sites were selected to both build and stress parts. Parts were selected from respective sites at a rate of 6 parts per week over a 6-month period. Results showed that the underfill and overcoating environment postpones the metal migration mechanism far beyond the product life cycle. The study also revealed that the Cr/Cu/Cr conductor lines and the Pb/Sn C4 structures were the regions most susceptible to migration. The acceleration factor of copper conductor migration between HAST and THB was 86 based on a visual inspection at 100X, yielding an activation energy (Ea) of 1.23 eV using the Arrhenius model. It was not possible to calculate the acceleration factor involving Pb/Sn sites, but electrical failures were found in HAST. The failure mechanism was Pb migration between C4 balls and the nearest Cr/Cu/Cr conductor line. It has also been identified that a C4 having a large void will fail earlier due to the bigger diameter. Based on a recent study (S. Peck), the average Ea in the microelectronics packaging industry has evolved from 0.79 eV some 10 years ago to about 0.9 eV today. In light of this, an Ea of 1.23 ev (copper migration) for an application with 50 microns cathode-to-anode is deemed very acceptable.
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