D. M. Tanner, W. M. Miller, W. Eaton, L. W. Irwin, K. Peterson, M. Dugger, D. Senft, N. F. Smith, P. Tangyunyong, S. Miller
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The effect of frequency on the lifetime of a surface micromachined microengine driving a load
Experiments have been performed on surface micromachined microengines driving load gears to determine the effect of the rotation frequency on median cycles to failure. We did observe a frequency dependence and have developed a model based on fundamental wear mechanisms and forces exhibited in resonant mechanical systems. Stressing loaded microengines caused observable wear in the rotating joints and, in a few instances, led to fracture of the pin joint in the drive gear.
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