高场电子输运特性对InGaAs/InAlAs异质结构晶体管性能的影响

John Zahurakt, Iliadis, Stephen, Rishtont, Ted Masselinkt
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引用次数: 1

摘要

我们在相同结构的器件中研究了各种掺杂和调制掺杂InGaAs/AlInAs量子阱中的电子输运。利用霍尔、几何磁电阻和高频速度场测量对结构中的电子速度进行了表征。在不同的δ掺杂井中测得的峰值速度为1.5/spl次/10/sup 7/ cm/s,而在MODFET结构中测得的峰值速度为2.0/spl次/10/sup 7/ cm/s。研究了不同井宽对输运特性的影响。栅极长度为1.8 /spl mu/m且通道均匀掺杂的fet的跨导率为267 mS/mm,而MODFET的跨导率为g/sub /=338 mS/mm。具有0.5 /spl μ /m栅极的modfet产生g/sub /=590 mS/mm。总的来说,器件性能与峰值电子速度有很好的相关性,与低场迁移率只有一定程度的相关性。
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Effect of high field electron transport characteristics on transistor performance in InGaAs/InAlAs heterostructures
We have studied electron transport in a variety of doped and modulation-doped InGaAs/AlInAs quantum wells within the context of FET performance in devices fabricated from the same structures. Electron velocities in the structure were characterized using Hall, geometric magnetoresistance, and high-frequency velocity-field measurements. Peak velocities of 1.5/spl times/10/sup 7/ cm/s were measured for various delta-doped wells, while a peak velocity of 2.0/spl times/10/sup 7/ cm/s was measured for the MODFET structure. The effect of various well widths on the transport characteristics was also studied. FETs with 1.8 /spl mu/m gate lengths and uniformly doped channels had transconductances of 267 mS/mm while the MODFET had g/sub m/=338 mS/mm. MODFETs with 0.5 /spl mu/m gates yielded g/sub m/=590 mS/mm. In general, device performance was well correlated to the peak electron velocity and only somewhat correlated to the low-field mobility.<>
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