{"title":"自动化寿命台先进的纳米技术的可靠性，老化测试的流动仪器用于测量，监测和控制室的温度","authors":"Hamed Ershad, Richard Fertell","doi":"10.1109/SSD.2016.7473720","DOIUrl":null,"url":null,"abstract":"Implementation and Benefits of an Automated Instrumentation System for Reliability, Aging and Accelerated Life Testing of Liquid Flow Rate Measuring Instruments used in Semiconductor Manufacturing Process Control, Chemical Vapor Deposition Chambers, and Nanotechnology design with real-life automated test system. Automated test system collects data, controls key elements, delivers alerts to users, and monitors real time results. The combination of automation and CVD Chamber process control can help stabilize and maintain temperature levels to obtain a higher yield in production and reduce overall energy consumption in the system.","PeriodicalId":149580,"journal":{"name":"2016 13th International Multi-Conference on Systems, Signals & Devices (SSD)","volume":"33 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2016-03-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Automated life stand advances nanotechnologies the reliability, aging tests of a flow instrument used to measure, monitor, and, control the chamber temperature\",\"authors\":\"Hamed Ershad, Richard Fertell\",\"doi\":\"10.1109/SSD.2016.7473720\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Implementation and Benefits of an Automated Instrumentation System for Reliability, Aging and Accelerated Life Testing of Liquid Flow Rate Measuring Instruments used in Semiconductor Manufacturing Process Control, Chemical Vapor Deposition Chambers, and Nanotechnology design with real-life automated test system. Automated test system collects data, controls key elements, delivers alerts to users, and monitors real time results. The combination of automation and CVD Chamber process control can help stabilize and maintain temperature levels to obtain a higher yield in production and reduce overall energy consumption in the system.\",\"PeriodicalId\":149580,\"journal\":{\"name\":\"2016 13th International Multi-Conference on Systems, Signals & Devices (SSD)\",\"volume\":\"33 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2016-03-21\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2016 13th International Multi-Conference on Systems, Signals & Devices (SSD)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/SSD.2016.7473720\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2016 13th International Multi-Conference on Systems, Signals & Devices (SSD)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SSD.2016.7473720","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Automated life stand advances nanotechnologies the reliability, aging tests of a flow instrument used to measure, monitor, and, control the chamber temperature
Implementation and Benefits of an Automated Instrumentation System for Reliability, Aging and Accelerated Life Testing of Liquid Flow Rate Measuring Instruments used in Semiconductor Manufacturing Process Control, Chemical Vapor Deposition Chambers, and Nanotechnology design with real-life automated test system. Automated test system collects data, controls key elements, delivers alerts to users, and monitors real time results. The combination of automation and CVD Chamber process control can help stabilize and maintain temperature levels to obtain a higher yield in production and reduce overall energy consumption in the system.
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