通过改进的可回流底填工艺开发倒装芯片组装

P. Miao, Y. Chew, Tie Wang, L. Foo
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引用次数: 5

摘要

本文提出了两种倒装芯片组装工艺,使具有较高填料负载的下填料被纳入封装。第一种工艺包括在基板表面上分配含有较高填料负载的下填料,然后在热压缩下进行芯片放置和焊料回流。除此之外,第二种方法实际上是对标准可回流底填料工艺的修改。将填料含量较高的下填料旋转涂覆在凹凸的晶圆表面,然后进行固化。随后,在晶圆切割之前,用激光处理暴露凸起的顶部。表面具有低CTE涂层的切块芯片已经通过标准的可回流衬底工艺组装,包括分配可回流衬底、芯片放置和通过回流炉的焊料回流。
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Flip-chip assembly development via modified reflowable underfill process
This paper presents two flip-chip assembly processes that enable an underfill with higher filler loading to be incorporated into the package. The first process includes dispensing the underfill containing higher filler loading on substrate surface, followed by chip placement and solder reflow under thermal compression. Apart from this, the second approach is virtually the modification of standard reflowable underfill process. The underfill with higher filler loading was spin-coated onto a bumped wafer surface and then cured. Subsequently, the top portion of bumps was exposed by laser treatment prior to wafer dicing. The diced chips with low CTE coating on the surface already were assembled via standard reflowable underfill process that includes dispensing reflowable underfill, chip placement and solder reflow through reflow oven.
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