Hybrid Approach Control of Micro-Positioning Stage with a Piezoelectric Actuator

For a class of system with nonlinear hysteresis, this paper presents an adaptive hybrid controller based on the hybrid backstepping-sliding mode, and describes the controller analytically by the LuGre model. Both backstepping and the sliding mode techniques are based on the Lyapunov theory. Drawing on this common point, the authors developed a new controller combining the two control techniques with a recursive design. The design aims to achieve two effects: assuring the stability of the closed loop system, and improving the continuous performance of the tracking position trajectory. The performance of the proposed hybrid controller was verified by implementing the identified Piezo model. The results show that our controller can track the system output desirably with the reference trajectory.