基于平面波导的PDMS集成光学结构

The Tenth International Conference on Advanced Semiconductor Devices and Microsystems Pub Date : 2014-10-01 DOI:10.1109/ASDAM.2014.6998704

D. Jandura, D. Pudiš, S. Slabeyciusová, J. Ďurišová

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引用次数: 1

摘要

本文介绍了以聚二甲基硅氧烷(PDMS)为材料的平面波导结构和器件的制备技术。采用直接激光刻写技术在光刻胶层中制备图案母版。在下一步中，通道波导和环形谐振器结构被印在PDMS材料上。最后，利用原子力显微镜对制备的波导结构进行了形貌表征。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Planar waveguide based structures for integrated optics on PDMS

In this paper, the fabrication technology for planar waveguide structures and devices in polydimethylsiloxane (PDMS) is presented. Direct laser writing was used to prepare pattern master in photoresist layer. In the next step, channel waveguide and ring resonator structures were imprinted in PDMS material. Finally, morphological properties of prepared waveguide structures were investigated by atomic force microscopy.

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The Tenth International Conference on Advanced Semiconductor Devices and Microsystems

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