{"title":"链式诊断作为先进工艺节点产量斜坡的工具","authors":"Jayant D'Souza","doi":"10.1109/IPFA55383.2022.9915780","DOIUrl":null,"url":null,"abstract":"Scan chains form a critical part of the test structures on digital designs. Chain diagnosis is commonly used in early yield ramp to root cause process issues. Recent advancements in chain diagnosis can not only improve chain diagnosis resolution but also provide more directed and meaningful information for failure analysis and fault isolation. This paper covers the basics of chain diagnosis and some recent technology advancements in chain diagnosis that have been leveraged in advanced process nodes below 7nm.","PeriodicalId":378702,"journal":{"name":"2022 IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA)","volume":"47 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2022-07-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Chain diagnosis as a tool for yield ramp in advanced process nodes\",\"authors\":\"Jayant D'Souza\",\"doi\":\"10.1109/IPFA55383.2022.9915780\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Scan chains form a critical part of the test structures on digital designs. Chain diagnosis is commonly used in early yield ramp to root cause process issues. Recent advancements in chain diagnosis can not only improve chain diagnosis resolution but also provide more directed and meaningful information for failure analysis and fault isolation. This paper covers the basics of chain diagnosis and some recent technology advancements in chain diagnosis that have been leveraged in advanced process nodes below 7nm.\",\"PeriodicalId\":378702,\"journal\":{\"name\":\"2022 IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA)\",\"volume\":\"47 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2022-07-18\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2022 IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/IPFA55383.2022.9915780\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2022 IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IPFA55383.2022.9915780","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Chain diagnosis as a tool for yield ramp in advanced process nodes
Scan chains form a critical part of the test structures on digital designs. Chain diagnosis is commonly used in early yield ramp to root cause process issues. Recent advancements in chain diagnosis can not only improve chain diagnosis resolution but also provide more directed and meaningful information for failure analysis and fault isolation. This paper covers the basics of chain diagnosis and some recent technology advancements in chain diagnosis that have been leveraged in advanced process nodes below 7nm.
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