用于单金质量三轴MEMS加速度计的三维电容检测电极

2021 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2021-03-22 DOI:10.1109/INERTIAL51137.2021.9430475

Takashi Ichikawa, A. Uchiyama, Kohei Shibata, S. Iida, Sang-yeop Lee, N. Ishihara, K. Machida, K. Masu, Hiroyuki Ito

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摘要

本文介绍了一种用于单金质量三轴MEMS(微机电系统)加速度计的电容检测电极。我们提出了一种3-D电容检测电极(3-DCE)，具有高而均匀的灵敏度，可检测微G (G=9.Sm/s2)水平。在分析灵敏度和布朗噪声BN的基础上，采用后cmos工艺的多金属层技术设计并制作了3-DCE器件。实验结果表明，得到的BNis为0.16µG/√Hz, X、Y、z轴的灵敏度分别为162、210和341 fF /G。

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A 3-D Capacitive-Detection Electrode for a Single Gold Proof-Mass Three-Axis MEMS Accelerometer

This paper describes a novel capacitive-detection electrode for a single gold proof-mass three-axis MEMS (microelectromechanical systems) accelerometer. We propose a 3-D capacitive-detection electrode (3-DCE) for a high and uniform sensitivity to sense micro-G (G=9.Sm/s2) level. Based on the analysis in terms of the sensitivity and the Brownian noise BN, we design and fabricate the device with 3-DCE by the multi-metal layer technology for a post-CMOS process. The experimental results show that the obtained BNis 0.16 µG/√Hz and the sensitivities of X-, Y-, and Z-axis are 162, 210, and 341 fF /G, respectively.

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2021 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)

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