精密定位元件装配焦平面阵列的构造技术特点

Constantine I. Barinov, S. Larionov, Mikhail O. Rapidov, E. N. Khrabrova
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引用次数: 0

摘要

利用单晶硅板的设计原理设计特殊结构和位置,可以简化焦平面阵列的组装过程,而不影响其精度特性。制造这种位置的技术方法提供了从单晶硅板等初始材料接收必要结构的方法,其工作表面集中在结晶轴的方向上。
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Constructive-technological features of assembling focal plane array with elements of precision positioning
The application of special structures and sites, which design are based on use of principles of designing on mono crystal silicon plates, allows to simplify process of assembling of focal plane arrays without deterioration of its precision characteristics. The technological methods of manufacturing of such sites provide reception of necessary structures from an initial material as plates of mono crystal silicon, which working surfaces are focused in a direction of the crystallographic axis <100>.
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