D. Wu, Q. Zhou, B. Zhu, K. Shung, F. Djuth, C. G. Liu
{"title":"高频(>100MHz) PZT厚膜换能器和无kerless阵列","authors":"D. Wu, Q. Zhou, B. Zhu, K. Shung, F. Djuth, C. G. Liu","doi":"10.1109/ISAF.2008.4693881","DOIUrl":null,"url":null,"abstract":"This paper presents the latest development of high-frequency (>100MHz) PZT film ultrasonic transducers and kerfless arrays. PZT thick films of 12 ¿m in thickness were fabricated with a spin-coating method. The films were found to have a remanent polarization of 33 ¿C/cm2 and a coercive field Ec of 70 kV/cm. High-frequency (120MHz) single element transducers and a kerfless array were successfully fabricated with these films. The transducer and array have ¿6dB bandwidth of 40% without matching, and 60% with a layer of parylene as the matching layer. The single element transducer was found to have an axial resolution of 20¿m and lateral resolution of 100¿m. Ultrasonic images of a porcine eye were also successfully acquired with the single element transducer. Kerfless array imaging is onging.","PeriodicalId":228914,"journal":{"name":"2008 17th IEEE International Symposium on the Applications of Ferroelectrics","volume":"10 11 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2008-12-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"4","resultStr":"{\"title\":\"High-frequency (>100MHz) PZT thick film transducers and Kerfless arrays\",\"authors\":\"D. Wu, Q. Zhou, B. Zhu, K. Shung, F. Djuth, C. G. Liu\",\"doi\":\"10.1109/ISAF.2008.4693881\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This paper presents the latest development of high-frequency (>100MHz) PZT film ultrasonic transducers and kerfless arrays. PZT thick films of 12 ¿m in thickness were fabricated with a spin-coating method. The films were found to have a remanent polarization of 33 ¿C/cm2 and a coercive field Ec of 70 kV/cm. High-frequency (120MHz) single element transducers and a kerfless array were successfully fabricated with these films. The transducer and array have ¿6dB bandwidth of 40% without matching, and 60% with a layer of parylene as the matching layer. The single element transducer was found to have an axial resolution of 20¿m and lateral resolution of 100¿m. Ultrasonic images of a porcine eye were also successfully acquired with the single element transducer. Kerfless array imaging is onging.\",\"PeriodicalId\":228914,\"journal\":{\"name\":\"2008 17th IEEE International Symposium on the Applications of Ferroelectrics\",\"volume\":\"10 11 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2008-12-02\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"4\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2008 17th IEEE International Symposium on the Applications of Ferroelectrics\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ISAF.2008.4693881\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2008 17th IEEE International Symposium on the Applications of Ferroelectrics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ISAF.2008.4693881","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
High-frequency (>100MHz) PZT thick film transducers and Kerfless arrays
This paper presents the latest development of high-frequency (>100MHz) PZT film ultrasonic transducers and kerfless arrays. PZT thick films of 12 ¿m in thickness were fabricated with a spin-coating method. The films were found to have a remanent polarization of 33 ¿C/cm2 and a coercive field Ec of 70 kV/cm. High-frequency (120MHz) single element transducers and a kerfless array were successfully fabricated with these films. The transducer and array have ¿6dB bandwidth of 40% without matching, and 60% with a layer of parylene as the matching layer. The single element transducer was found to have an axial resolution of 20¿m and lateral resolution of 100¿m. Ultrasonic images of a porcine eye were also successfully acquired with the single element transducer. Kerfless array imaging is onging.
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