PNP-eSCR ESD保护装置,具有可调触发和保持电压,适用于高压应用

Da-Wei Lai, S. Zhao, Jian Gao, T. Smedes
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引用次数: 8

摘要

提出了一种可调VT1和VH的高电压ESD器件(嵌入式可控硅PNP)。调优是通过设计和工艺选项实现的。触发机制由PNP(s)和二极管串联决定。保持电压由eSCR和额外的PNP(s)决定。
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PNP-eSCR ESD protection device with tunable trigger and holding voltage for high voltage applications
A novel ESD device (PNP with embedded SCR), with tunable VT1 and VH, is proposed for high voltage applications. Tuning is achieved through design and process options. The trigger mechanism is determined by the series connection of PNP(s) and diode. The holding voltage is determined by the eSCR and additional PNP(s).
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