GMR磁记录头的纳米磨削研究

Rulin Shen, C. Shuai, J. Zhong
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引用次数: 0

摘要

本研究的目的是为了更好地理解在纳米磨削中超光滑硬盘磁头(单个磁头也称为“滑块”)表面是如何形成的。采用浮片抛光机进行纳米磨削,实现了超光滑的平面表面。采用扫描电子显微镜对纳米磨削用金刚石磨料和嵌装金刚石磨料的片材进行了观察。采用扫描电镜(SEM)和原子力显微镜(AFM)对纳米磨削前后的滑块表面进行了测量。虽然滑块表面的连续平面可能存在微切削,但在纳米磨削中,滑块表面的不连续粗糙度是不可忽视的。通过对滑块表面的统计分析,逐步去除表面的凹凸不平,用一系列较小的凹凸不平代替,使表面逐渐光滑,最终得到亚纳米级的光滑表面。建立了一个理论模型来说明磨料去除单个粗糙体的过程。根据该模型计算了单个磨料所受的去除力。由于磨料排列规则,可以在一定程度上保护极尖,因此在纳米磨削中可以获得更多的平面滑块表面。结合该模型和滑块表面粗糙度的分布,可以对滑块表面的质量进行评价,并对纳米磨削工艺进行优化。
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Study of Nano-grinding for GMR Magnetic Recording Head
The objective of this research is to better understand in what way the ultra smooth hard disk magnetic head (the individual head also called 'slider') surface is formed in nanogrinding. A float-piece polisher was used to achieve ultra smooth and planar surface in nano-grinding way. The SEM was used to observe the diamond abrasive used in nano-grinding and the plate embedded with diamond abrasive. The slider surface was measured with SEM and AFM before and after nano-grinding. Though the micro-cutting of the continuous plane of the slider surface may exit, it was demonstrated that the un-continuous asperity of the slider surface can't be ignored in nano-grinding. According to the statistic analysis of the slider surface, the asperities are removed and replaced by a series of smaller asperities step by step, in this way, smoother surface is achieved gradually, and finally, a sub-nanometer smooth surface was achieved. A theoretical model was developed to illustrate the removal of single asperity removed by abrasive. The removal force taking by a single abrasive was calculated according to the model. Pole tip can be protected in some extent because of the regular arrange of the abrasive, so more planar slider surface was achieved in nano-grinding. Combined with the model and the distribution of the asperity of slider surface, the quality of the slider surface can be estimated and the nano-grinding procedure can be optimized.
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