一种结合机械和热信息的电子封装可靠性无损检测方法

Chuanguo Xiong, Baoshan Zeng, Yuhua Huang, F. Zhu
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引用次数: 2

摘要

电子元件的失效可能是由于热负荷不均匀、封装材料之间的热膨胀系数(CTE)不同或焊料固化收缩造成的。常见的失效包括衬底翘曲、结构分层和开裂,这反映了热变形检测对封装结构的意义。为了说明电子封装的热力学特性,提出了一种结合投影散斑三维数字图像相关(3D DIC)技术和红外热成像(IRT)技术的无损检测方法。通过摄像机标定得到样品表面各点的温度,从而实现机械和热信息的耦合。该方法可以在不污染样品的情况下测量面外位移,并且可以在不同的应用场合灵活地调整投影散斑。通过位移测量和芯片加热实验对检测系统进行了验证,位移的标准差可控制在1µm以内。
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A non-destructive inspection method for electronic packaging reliability incorporating mechanical and thermal information
Electronic components may fail because of non-uniform thermal load, different Coefficients of Thermal Expansion (CTE) among packaging materials, or solder curing shrinkage. Common failures include substrate warpage, structure delamination, and cracking, which reflect the signification of thermal deformation detection for packaging structures. To illustrate the thermo mechanical properties of electronic packages, a non-destructive inspection method combining the projected speckle three-dimensional digital image correlation (3D DIC) technique and infrared thermography (IRT) is proposed. The temperature of each point on the sample surface is obtained by camera calibration, thereby realizing the coupling of mechanical and thermal information. This method can measure out-of-plane displacement without contaminating the sample and adjust the projected speckle flexibly in different applied situations. The inspection system is validated by displacement measurement and chip-heating experiments, and the standard deviation of displacement can be controlled within 1µm.
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