硅中离子相互作用的研究:瞬态过程和缺陷的产生

S. Lazanu, I. Lazanu, G. Iordache, I. Stavarache, A. Lepadatu, A. Slav
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引用次数: 1

摘要

将弹丸的电离过程和核能量损失过程作为不同的电子热源和原子热源考虑在内的热尖峰模型用于描述硅离子诱导的瞬态过程。计算了弹丸轨迹附近晶格温度和电子温度的时空依赖关系。考虑了温度升高对缺陷形成和退火的影响。
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Study of the interactions of ions in silicon: Transient processes and defect production
The thermal spike model which takes into account both ionization and nuclear energy loss processes of the projectile as distinct electronic and atomic heat sources is used to describe transient processes induced by ions in silicon. The time and space dependencies of the lattice and electron temperatures near the projectile trajectory are calculated. The contribution of the rise in temperature on defect formation and annealing is considered.
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