用于5微米红外探测的PbTe上的MIS电容器

M. Moulin, P. Felix, B. Munier, J. Reboul, N.T. Linhn
{"title":"用于5微米红外探测的PbTe上的MIS电容器","authors":"M. Moulin, P. Felix, B. Munier, J. Reboul, N.T. Linhn","doi":"10.1109/IEDM.1977.189318","DOIUrl":null,"url":null,"abstract":"Metal-insulator-semiconductor (MIS) capacitors (Al/Al2O3/p-PbTe and Al/MgO/p-PbTe) on PbTe single crystals have been investigated for 5 micron infrared detection. The PbTe comes from Czochraslki single crystals, annealed to lower the carrier concentration. The insulator layers are e-beam deposited Al2O3and MgO. The C(V) curves of these MIS were checked at 77 K. The p-type semiconductor is depleted at zero bias and the flat-band voltage is from 4 to 10 volts for 1500 A° of insulator. The curves indicate a PbTe carrier concentration near 1016cm-3, in agreement with junction characteristic measurements on the same wafers. Transient capacitance measurements on these MIS capacitors give a transient or storage time of 1 to 5 ms, with a 77 K background. Measurements of conductance and variation of conductance with frequency give a lifetime in PbTe of 0,8 to 2 ns. We conclude that such MIS capacitors can be used for IR detection in PbTe with charge-injection readout.","PeriodicalId":218912,"journal":{"name":"1977 International Electron Devices Meeting","volume":"15 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"MIS capacitors on PbTe for 5 micron infrared detection\",\"authors\":\"M. Moulin, P. Felix, B. Munier, J. Reboul, N.T. Linhn\",\"doi\":\"10.1109/IEDM.1977.189318\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Metal-insulator-semiconductor (MIS) capacitors (Al/Al2O3/p-PbTe and Al/MgO/p-PbTe) on PbTe single crystals have been investigated for 5 micron infrared detection. The PbTe comes from Czochraslki single crystals, annealed to lower the carrier concentration. The insulator layers are e-beam deposited Al2O3and MgO. The C(V) curves of these MIS were checked at 77 K. The p-type semiconductor is depleted at zero bias and the flat-band voltage is from 4 to 10 volts for 1500 A° of insulator. The curves indicate a PbTe carrier concentration near 1016cm-3, in agreement with junction characteristic measurements on the same wafers. Transient capacitance measurements on these MIS capacitors give a transient or storage time of 1 to 5 ms, with a 77 K background. Measurements of conductance and variation of conductance with frequency give a lifetime in PbTe of 0,8 to 2 ns. We conclude that such MIS capacitors can be used for IR detection in PbTe with charge-injection readout.\",\"PeriodicalId\":218912,\"journal\":{\"name\":\"1977 International Electron Devices Meeting\",\"volume\":\"15 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1900-01-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"1977 International Electron Devices Meeting\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/IEDM.1977.189318\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"1977 International Electron Devices Meeting","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IEDM.1977.189318","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1

摘要

研究了金属绝缘体半导体(MIS)电容器(Al/Al2O3/p-PbTe和Al/MgO/p-PbTe)在PbTe单晶上的5微米红外探测性能。PbTe来自chzochraslki单晶,经过退火以降低载流子浓度。绝缘层由电子束沉积al2o3和MgO组成。在77 K时检查这些MIS的C(V)曲线。p型半导体在零偏压下耗尽,1500 A°绝缘体的平带电压为4 ~ 10伏。曲线显示PbTe载流子浓度在1016cm-3附近,与同一晶圆上的结特性测量结果一致。这些MIS电容器的瞬态电容测量给出的瞬态或存储时间为1至5毫秒,背景电压为77 K。电导和电导随频率变化的测量结果表明,在PbTe中的寿命为0.8 ~ 2ns。我们得出结论,这种MIS电容器可以用于带电荷注入读出的PbTe红外检测。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
查看原文
分享 分享
微信好友 朋友圈 QQ好友 复制链接
本刊更多论文
MIS capacitors on PbTe for 5 micron infrared detection
Metal-insulator-semiconductor (MIS) capacitors (Al/Al2O3/p-PbTe and Al/MgO/p-PbTe) on PbTe single crystals have been investigated for 5 micron infrared detection. The PbTe comes from Czochraslki single crystals, annealed to lower the carrier concentration. The insulator layers are e-beam deposited Al2O3and MgO. The C(V) curves of these MIS were checked at 77 K. The p-type semiconductor is depleted at zero bias and the flat-band voltage is from 4 to 10 volts for 1500 A° of insulator. The curves indicate a PbTe carrier concentration near 1016cm-3, in agreement with junction characteristic measurements on the same wafers. Transient capacitance measurements on these MIS capacitors give a transient or storage time of 1 to 5 ms, with a 77 K background. Measurements of conductance and variation of conductance with frequency give a lifetime in PbTe of 0,8 to 2 ns. We conclude that such MIS capacitors can be used for IR detection in PbTe with charge-injection readout.
求助全文
通过发布文献求助,成功后即可免费获取论文全文。 去求助
来源期刊
自引率
0.00%
发文量
0
期刊最新文献
Anodic oxidation of GaAs in oxygen plasma Life begins at forty: Microwave tubes Multi-anode microchannel arrays Gunn effect high-speed carry finding device for 8-bit binary adder New type of varactor diode having strongly nonlinear C-V characteristics
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
现在去查看 取消
×
提示
确定
0
微信
客服QQ
Book学术公众号 扫码关注我们
反馈
×
意见反馈
请填写您的意见或建议
请填写您的手机或邮箱
已复制链接
已复制链接
快去分享给好友吧!
我知道了
×
扫码分享
扫码分享
Book学术官方微信
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术
文献互助 智能选刊 最新文献 互助须知 联系我们:info@booksci.cn
Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。
Copyright © 2023 Book学术 All rights reserved.
ghs 京公网安备 11010802042870号 京ICP备2023020795号-1