M. Tanksalvala, Christina L. Porter, Yuka Esashi, Galen P. Miley, N. Horiguchi, Robert M. Karl, Peter C Johnsen, C. Bevis, N. Jenkins, Bin Wang, Xiaoshi Zhang, S. Cousin, D. Adams, M. Gerrity, H. Kapteyn, M. Murnane
{"title":"使用桌面高谐波光测量掺杂物轮廓的复杂成像反射法","authors":"M. Tanksalvala, Christina L. Porter, Yuka Esashi, Galen P. Miley, N. Horiguchi, Robert M. Karl, Peter C Johnsen, C. Bevis, N. Jenkins, Bin Wang, Xiaoshi Zhang, S. Cousin, D. Adams, M. Gerrity, H. Kapteyn, M. Murnane","doi":"10.1364/COSI.2019.CW3A.6","DOIUrl":null,"url":null,"abstract":"We present a tabletop-scale complex-imaging EUV reflectometer that uses grazing- incidence ptychographic imaging to non-destructively determine depth-dependent, spatially-resolved composition with high sensitivity to chemical makeup, thin film layer thickness, interface quality and dopant profiles.","PeriodicalId":123636,"journal":{"name":"Imaging and Applied Optics 2019 (COSI, IS, MATH, pcAOP)","volume":"208 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2019-06-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Complex Imaging Reflectometry for Dopant Profile Measurements using Tabletop High Harmonic Light\",\"authors\":\"M. Tanksalvala, Christina L. Porter, Yuka Esashi, Galen P. Miley, N. Horiguchi, Robert M. Karl, Peter C Johnsen, C. Bevis, N. Jenkins, Bin Wang, Xiaoshi Zhang, S. Cousin, D. Adams, M. Gerrity, H. Kapteyn, M. Murnane\",\"doi\":\"10.1364/COSI.2019.CW3A.6\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"We present a tabletop-scale complex-imaging EUV reflectometer that uses grazing- incidence ptychographic imaging to non-destructively determine depth-dependent, spatially-resolved composition with high sensitivity to chemical makeup, thin film layer thickness, interface quality and dopant profiles.\",\"PeriodicalId\":123636,\"journal\":{\"name\":\"Imaging and Applied Optics 2019 (COSI, IS, MATH, pcAOP)\",\"volume\":\"208 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2019-06-24\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Imaging and Applied Optics 2019 (COSI, IS, MATH, pcAOP)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1364/COSI.2019.CW3A.6\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Imaging and Applied Optics 2019 (COSI, IS, MATH, pcAOP)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1364/COSI.2019.CW3A.6","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Complex Imaging Reflectometry for Dopant Profile Measurements using Tabletop High Harmonic Light
We present a tabletop-scale complex-imaging EUV reflectometer that uses grazing- incidence ptychographic imaging to non-destructively determine depth-dependent, spatially-resolved composition with high sensitivity to chemical makeup, thin film layer thickness, interface quality and dopant profiles.
京公网安备 11010802042870号
京ICP备2023020795号-1
分享
求助内容：
应助结果提醒方式：
扫码关注我们
