亚1nm超窄二硫化钼纳米带场效应晶体管输运特性的原子研究

Fei Wang, Xiaolei Ma, Jixuan Wu, Jiezhi Chen, Xiangwei Jiang
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摘要

在这项工作中,研究了具有超窄单层MoS2沟道的纳米带场效应晶体管(fet),以了解MoS2 fet的横向缩放限制。结果表明,钝化原子对单层二硫化钼的带隙影响较大,其中OH钝化比H钝化更有效。然后,计算了钝化原子对MoS2超窄通道场效应管输运特性的影响。虽然在O/H钝化的窄MoS2 fet中可以获得更高的离子和更低的Ioff,但由于边缘态的贡献,Ioff很难被抑制。我们的研究结果表明,边缘状态工程可能是将MoS2器件集成到CMOS技术中的一个关键点。
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Atomistic Study of Transport Characteristics in Sub-1nm Ultra-narrow Molybdenum Disulfide (MoS2) Nanoribbon Field Effect Transistors
In this work, nanoribbon field-effect-transistors (FETs) with an ultra-narrow monolayer MoS2 channel are investigated to understand the transverse scaling limitations of MoS2 FETs. It is observed that the bandgap of monolayer nanoribbon MoS2 can be largely affected by the passivation atoms, wherein OH passivation is more effective than H passivation. Then, impacts of passivation atoms on transport characteristics in MoS2 FETs with ultra-narrow MoS2 channel are calculated. Though higher Ion and lower Ioff can be obtained even in narrow MoS2 FETs with O/H passivation, Ioff is hard to be suppressed due to the contribution of edge states. Our results indicate that edge states engineering could be one key point to integrate MoS2 devices into CMOS technology.
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