数字电子的原子精密先进制造

D. Ward, S. Schmucker, E. Anderson, E. Bussmann, L. Tracy, T. Lu, L. Maurer, A. Baczewski, Deanna Campbell, M. Marshall, S. Misra
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引用次数: 25

摘要

在20世纪90年代末,将原子一个接一个地放置在特定原子位置的能力首次被用于制造功能性电子设备。从那时起,被称为原子精密先进制造(APAM)的工艺得到了进一步发展,学术和商业对其潜力的兴趣都在增长。本文描述了该工艺的细微差别,解释了它使用表面化学将掺杂剂放入硅中,这是一种在微加工中通常不使用的机制。它还讨论了使用APAM技术开发更复杂量子器件的持续努力,并概述了在同一芯片上连接APAM和CMOS器件所涉及的挑战。
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Atomic Precision Advanced Manufacturing for Digital Electronics
The ability to place atoms one by one at specific atomic sites was first used to create functioning electronic devices in the late 1990s. Since then, the process known as atomic precision advanced manufacturing (APAM) has been further developed and both academic and commercial interest in its potential has grown. This article describes the nuances of the process, explaining that it places dopants into silicon using surface chemistry, a mechanism not typically used in microfabrication. It also discusses ongoing efforts to develop more complex quantum devices using APAM techniques and outlines the challenges involved in interfacing APAM and CMOS devices on the same die.
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