改性源型FD-SOI MOSFET表面电位的分析建模

Nilesh Anand Srivastava, V. Mishra, R. Chauhan
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引用次数: 18

摘要

本文建立了改性源全贫绝缘体上硅(FD-SOI) n-MOSFET中沿沟道方向表面电位变化的二维解析模型。为了展示改进后的FD-SOI MOSFET的新特性,本文还从硅膜厚度变化的影响和不同水平源掺杂的影响等方面研究了二维表面电位模型。为了验证器件的短通道抗扰度,讨论了DIBL在不同漏源电压下的表面电位与通道长度的关系。
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Analytical modelling of surface potential of modified source FD-SOI MOSFET
In this paper, a 2-D (two dimensional) analytical model for the surface potential variation forward to the channel in modified source fully depleted silicon on insulator (FD-SOI) n-MOSFET has been presented. In order to demonstrate the novel features offered by the modified source FD-SOI MOSFET n-MOSFET, the two dimensional surface potential model has also been investigated on various aspects such as effect of silicon film thickness variation and effects of different levels of source doping. And in continuation, to verify the short channel immunity of the device the surface potential model vs channel length for DIBL at different drain to source voltages has been discussed.
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