线性光敏传感器阵列采用非晶薄膜

T. Tsukada, H. Yamamoto, M. Matsui, Y. Eto, T. Hirai, E. Maruyama
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摘要

本文介绍了以非晶薄膜为光导探测器的线性成像器件的制作方法和特点。由于非晶膜可以通过真空沉积来制造,因此可以制造长210mm的传感器阵列,这是接触式成像器件的关键部件。接触式成像传感器不需要光学透镜系统,这有效地减小了传真机等设备的总体尺寸。在玻璃纤维基板上沉积传感器薄膜,制作了传真设备的原型。该传感器薄膜由Se-As-Te硫系玻璃制成。使用LED作为光源照亮原始纸张。实验结果证实了非晶薄膜可以应用于接触式线性光敏传感器阵列。
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Linear photosensor array using an amorphous thin film
In this paper, the fabrication and characteristics of the linear imaging device which uses an amorphous thin film as a photoconductive detector are described. Since the amorphous film can be made by vacuum deposition, it is possible to fabricate a long, 210 mm, sensor array, which is a key component of a contact type imaging device. A contact type imaging sensor does not require an optical lens system, and this is effective in reducing the overall size of such equipment as facsimile. A prototype of the facsimile equipment was fabricated depositing a sensor film on a fiber glass substrate. This sensor film was made of Se-As-Te chalcogenide glass. LED's were used as light sources to illuminate the original paper. The experimental results confirm that amorphous thin films are applicable to a contact-type linear photosensor array.
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