自包含电荷耦合分电极滤波器的传感技术

C. Séquin, M. Tompsett, D. Sealer, P. Suciu, P. Ryan
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引用次数: 7

摘要

本文将介绍一种独立的电荷耦合55分接分电极滤波器。必须解决的主要问题是如何将来自传感电极的信号转换成具有大动态范围和最小谐波失真的可用输出信号。在制定这个问题的解决方案时必须考虑的因素是:(1)消除耗尽电容的影响;(2)在存在大共模信号时检测差分信号;(3)防止检测电路中的复位噪声。避免分裂感测电极下耗尽电容影响的一种实用方法是在感测过程中,通过在运算放大器周围使用反馈回路,使这些电极保持在固定电位,如图1所示。该传感电路最佳地与电荷转移通道的电压输入结合使用,其中电荷包在MOS电极下测量,(MW),其几何形状与传感电极相同,并且也保持在相同的电位VSE;图1所示。从施加到输入二极管的电压(因此计量井中的界面电位为MW)到在感测电极上产生的图像电荷量(因此输出电压为V O ~ T)的总体转移特性可以预期为线性。各种可能的方法钳位感测电极到一个给定的电位,并提取所需的输出信号已在前面讨论过。图2显示了一种在较大的共模信号存在的情况下提取这种差分信号的新方法。一个放大器(AD)执行差分操作,而另一个放大器(Ac)用于抑制两个检测总线上的共模信号。AC的工作原理是将检测电极电位的算术平均值与检测电压参考VSE进行比较,并通过电容CCt和Cc将相同的误差信号反馈给两个检测母线,AD周围的反馈信号通过cdd保持两个检测母线之间的平衡,并结合起来
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Sensing technique for self-contained charge-coupled split-electrode filters
A SELF-CONTAINED charge-coupled 55-tap split-electrode filter will be described in this paper. The major problem that had to be solved was that of transforming the signal from the sense electrodes into a usable output signal with a large dynamic range and a minimal harmonic distortion. The factors that must be considered in formulating a solution to this problem are: (1) eliminating the effects of depletion capacitance, (2) detecting a difference signal in the presence of a large common mode signal and (3) preventing reset noise in the detection circuitry. A practical method to avoid the effects of depletion capacitance under the split sense electrodes is to keep these electrodes at a fixed potential during the sensing process by using a feedback loop around an operational amplifier as indicated in Figure 1. This sensing circuitry is optimally used in conjunction with a voltage input to the charge transfer channel, where the charge packets are metered under an MOS electrode, (MW), the geometry of which is the same as that of the sense electrodes, and which is also kept at the same potential VSE; Figure 1. The overall transfer characteristic from the voltage applied to the input diode, (and thus the interface potential in the metering well MW) to the amount of image charge produced on the sense electrodes (and hence the output voltage V O ~ T ) can then be expected to be linear. Various possible ways to clamp the sense electrodes to a given potential and to extract the desired output signal have been discussed earlier’’2. A novel approach to extract this difference signal in the presence of the considerably larger common mode signal is shown in Figure 2. One amplifier (AD) performs the differencing operation, while the other amplifier ( Ac) is used to suppress the common mode signal on the two sense busses. AC operates by comparing the arithmetic mean of the sense electrode potentials to the sense voltage reference VSE and feeds back the same error signal to both sense busses through capacitors CCt and Cc. The feedback signal around AD through CDwll maintain the balance between the two sense busses, and the combined
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