Al/Nb层阳极氧化制备铌柱状纳米结构的电物理性质

A. Pligovka, A. Lazavenka, A. Zakhlebayeva
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引用次数: 8

摘要

对溅射沉积的Al/Nb金属层进行阳极氧化、再阳极氧化和化学蚀刻,合成了两种铌柱状纳米结构。利用扫描电镜对合成的铌柱状纳米结构进行了形貌表征。采用两种测量方法研究了铌柱状纳米结构的电物理特性。接触垫采用厚度为500 nm的铝层。电流-电压I-U特性具有非线性和非对称特性。温度的升高导致电流的增大。这种行为可能表明是pn结或金属半导体结。23℃时的初始电阻分别为60和120 kOhms,柱高比电阻分别为87和116 kOhms·nm -1,计算得到的电阻温度系数为负且较低,分别为$-1.39\乘以10^{-2}$和$-1.28\乘以10^{-2}$。
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Electro-Physical Properties of Niobia Columnlike Nanostructures via the Anodizing of Al/Nb Layers
Two types of niobia columnlike nanostructures were synthesized by anodization, reanodization, and chemical etching of sputter-deposited Al/Nb metal layers. The morphological properties of synthesized niobia columnlike nanostructures were determined by means of scanning electron microscopy. The electro-physical characteristics of niobia columnlike nanostructures were investigated in two measurement schemes. Aluminum layers of thickness 500 nm were used as contact pads. The current-voltage I-U characteristic has a nonlinear and nonsymmetrical character. The rising of temperature leads to an increase of the current. This behavior may indicate a p-n or metal-semiconductor junction. The initial resistance at 23 °C was 60 and 120 kOhms, the specific resistance to the height of the columns was 87 and 116 kOhms·nm−1, the calculated temperature coefficient of resistance appeared to be negative and rather low: $-1.39\times 10^{-2}$ and $-1.28\times 10^{-2}\mathrm{K}^{-1}$ for the niobia columnlike nanostructures reanodized at 300 and 450 V, respectively.
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