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引用次数: 4

摘要

本文研究了体声波压电谐振器中最有前景的材料之一LGT (La/sub 3/Ga/sub 5/ /sub .5/TaO/sub 0.5/O/sub 14/)晶体对体声波的衰减。采用了实验研究和衰减系数测量两种方法。使用的第一种方法是先前用于研究langasite的改进体声波复合谐振器光谱方法。复合谐振器结构是一种多频体声波谐振器。结构中的共振在频域上间隔几MHz,并且在半GHz到几GHz的宽频率范围内观察到。因此,从宽频域谐振峰宽度的数据可以得到结构的总声损失。改进后的HBAR光谱仅基于复合谐振器结构在每个共振频率下的平行共振带宽的测量。对传感器的损耗和由于表面粗糙度造成的损耗进行了评估,要么忽略不计,要么(如有必要)从总损耗中减去。研究发现,在整个频带中,大多数BAW极化的频率依赖关系不是理想的平方(正如Akhiezer理论所要求的那样),但在高频限制下,它们的行为非常接近平方定律。第二种方法是传统的回波脉冲法。在大多数实验中,两种方法在高频区域的声损失接近。本文主要讨论了改进的HBAR光谱方法,并对LGT中的衰减进行了讨论。讨论了实验观察到的所有特性,给出了最感兴趣方向的衰减常数数据和Qf积值。
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Bulk acoustic wave attenuation in langatate
The report is devoted to the study of the attenuation of bulk acoustic waves in crystals of LGT (La/sub 3/Ga/sub 5/ /sub .5/TaO/sub 0.5/O/sub 14/) - one of the most perspective materials for bulk acoustic wave piezoelectric resonators. Two methods of the experimental study and measurements of attenuation coefficient were used. The first method used was a modified bulk acoustic wave composite resonator spectroscopy method previously applied to the study of langasite. A composite resonator structure is a multifrequency bulk acoustic wave resonator. The resonances in the structure were spaced in frequency domain by few MHz and were observed in a wide frequency region from half up to a few GHz. So it was possible to find total acoustic losses in the structure from the data on resonant peaks width in a wide frequency domain. The new modified version of HBAR spectroscopy is based on the measurements of only parallel resonance bandwidth of composite resonator structures at each resonance frequency. Losses in transducers and those due to surface roughness were evaluated and either neglected or (if necessary) subtracted from the total losses. It was found that the frequency dependences in the whole band for most BAW polarizations are not ideally square (as it is required in Akhiezer theory), but at high frequencies limit their behavior is very close to the square law. The second method used in the work was a traditional echo-pulse method. For most experiments the acoustic losses obtained by two methods at high frequency region were close to each other. Here we concentrate our attention on modified HBAR spectroscopy method and on the discussion of the attenuation in LGT. All the peculiarities observed experimentally are discussed, attenuation constants data and Qf product values for most interesting directions are presented.
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