脉冲激光沉积制备非晶锗砷碲薄膜:光稳定性研究

M. Bouška, P. Hawlová, V. Nazabal, L. Beneš, P. Němec
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引用次数: 0

摘要

采用脉冲激光沉积技术制备了Ge-As-Te非晶薄膜,研究了其固有光稳定性。利用椭圆偏振光谱对制备层的光稳定性进行了研究。在材料的带隙区,采用三种能量(1.17、0.92和0.8 eV)的激光源进行辐照。Ge20As20Te60薄膜的光折射率(折射率变化)最小,带隙值变化最小,因此被认为是光稳定性最高的层,特别是在松弛状态下。
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Amorphous Ge-As-Te thin films prepared by pulsed laser deposition: A photostability study
Pulsed laser deposition was used for the fabrication of amorphous thin films from Ge-As-Te system with the aim to study their intrinsic photostability. Photostability of prepared layers was studied using spectroscopic ellipsometry within as-deposited as well as relaxed layers. For irradiation, laser sources operating at three energies (1.17, 0.92 and 0.8 eV) in band gap region of the studied materials were employed. The lowest values of photorefraction (refractive index changes) accompanied with lowest changes of band gap values present Ge20As20Te60 thin films, which are therefore considered as the layers with highest photostability, especially in relaxed state.
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