柔性热电器件的发展:器件性能的提高

Y. Iwasaki, M. Takeda
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引用次数: 10

摘要

热电(TE)器件存在机械强度低、制造成本高等问题。为了克服这些问题,我们正在开发使用薄膜和柔性基板的柔性TE器件。本工作的目的是制作和评估柔性TE器件。一种柔性TE器件由在两个柔性衬底之间的n型和p型TE材料气相沉积薄膜组成。柔性衬底是由聚酰亚胺和铜的组合而成。这种结构使器件本身能够将外表面温差(DeltaTout)转换为面内温差(deltatin),并通过p-n偶产生电能。采用有限元法对器件的温度分布进行了分析。根据分析,具有较薄的聚酰亚胺层(h1)和较厚的铜层(h1)的柔性衬底更适合获得较大的温差。我们制作了包含33对p-n偶的柔性TE器件,该器件由铬镍合金和康钽薄膜组成。h1/h2 = 12 mum/70 mum的装置在DeltaTout = 22.7 K时产生3.72 muW,而h1/h2 = 35 mum/25 mum的装置在DeltaTout = 24.0 K时产生2.40 muW。根据分析结果,柔性TE器件的性能得到了成功的改善
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Development of flexible thermoelectric device: Improvement of device performance
Thermoelectric (TE) device has some problems, such as low mechanical strength, high manufacturing cost, etc. We are developing flexible TE device using thin films and flexible substrates in order to overcome those problems. The purpose of this work is to fabricate and evaluate the flexible TE device. A flexible TE device consists of vapor-deposited thin films of n- and p-type TE materials between two flexible substrates. The flexible substrate is made up of a combination of polyimide and copper. This structure enables the device itself to convert temperature difference of outer surfaces (DeltaTout) into in-plane temperature difference (DeltaT in), and it can generate electricity by the p-n couples. We analyzed temperature distribution of the device by the finite element method (FEM). According to the analysis, a flexible substrate which has thinner polyimide layer (h1) and thicker copper layer (h1) is preferable to obtain larger temperature difference. We fabricated flexible TE devices containing 33 pairs of p-n couple, which is composed of chromel and constantan thin films. The device of h 1/h2 = 12 mum/70 mum generated 3.72 muW at DeltaTout = 22.7 K, while 2.40 muW was generated from the device of h1/h2 = 35 mum/25 mum at DeltaT out = 24.0 K. The performance of the flexible TE device was successfully improved as predicted by the analysis
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