{"title":"外延PZT薄膜压电驱动型2轴倾斜控制装置的制作与评价","authors":"K. Ozaki, D. Akai, K. Sawada, M. Ishida","doi":"10.1109/OMEMS.2010.5672153","DOIUrl":null,"url":null,"abstract":"Piezoelectric drive type 2-axis tilt control device using epitaxial Pb(Zr<inf>0.52</inf>, Ti<inf>0.48</inf>)O<inf>3</inf> (PZT) thin film on epitaxial γ-Al<inf>2</inf>O<inf>3</inf>/Si substrate have been fabricated. A 500 nm-thick epitaxial PZT(111) thin film was sol-gel deposited on epitaxial SrRuO3(111)/Pt(111)/ γ-Al<inf>2</inf>O<inf>3</inf>(111)/Si(1 11) substrates, and hollow structure under actuate area was formed by XeF<inf>2</inf> gas etching. The fabricated device showed polarization-electric field (P-E) hysteresis loop of piezoelectric PZT thin film and the deflection. Therefore, the realization of piezoelectric drive type deformable mirrors (DMs) using epitaxial PZT thin film can be expected.","PeriodicalId":421895,"journal":{"name":"2010 International Conference on Optical MEMS and Nanophotonics","volume":"26 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2010-12-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Fabrication and evaluation of piezoelectric drive type 2-axis tilt control device using epitaxial PZT thin film\",\"authors\":\"K. Ozaki, D. Akai, K. Sawada, M. Ishida\",\"doi\":\"10.1109/OMEMS.2010.5672153\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Piezoelectric drive type 2-axis tilt control device using epitaxial Pb(Zr<inf>0.52</inf>, Ti<inf>0.48</inf>)O<inf>3</inf> (PZT) thin film on epitaxial γ-Al<inf>2</inf>O<inf>3</inf>/Si substrate have been fabricated. A 500 nm-thick epitaxial PZT(111) thin film was sol-gel deposited on epitaxial SrRuO3(111)/Pt(111)/ γ-Al<inf>2</inf>O<inf>3</inf>(111)/Si(1 11) substrates, and hollow structure under actuate area was formed by XeF<inf>2</inf> gas etching. The fabricated device showed polarization-electric field (P-E) hysteresis loop of piezoelectric PZT thin film and the deflection. Therefore, the realization of piezoelectric drive type deformable mirrors (DMs) using epitaxial PZT thin film can be expected.\",\"PeriodicalId\":421895,\"journal\":{\"name\":\"2010 International Conference on Optical MEMS and Nanophotonics\",\"volume\":\"26 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2010-12-17\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2010 International Conference on Optical MEMS and Nanophotonics\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/OMEMS.2010.5672153\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2010 International Conference on Optical MEMS and Nanophotonics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/OMEMS.2010.5672153","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Fabrication and evaluation of piezoelectric drive type 2-axis tilt control device using epitaxial PZT thin film
Piezoelectric drive type 2-axis tilt control device using epitaxial Pb(Zr0.52, Ti0.48)O3 (PZT) thin film on epitaxial γ-Al2O3/Si substrate have been fabricated. A 500 nm-thick epitaxial PZT(111) thin film was sol-gel deposited on epitaxial SrRuO3(111)/Pt(111)/ γ-Al2O3(111)/Si(1 11) substrates, and hollow structure under actuate area was formed by XeF2 gas etching. The fabricated device showed polarization-electric field (P-E) hysteresis loop of piezoelectric PZT thin film and the deflection. Therefore, the realization of piezoelectric drive type deformable mirrors (DMs) using epitaxial PZT thin film can be expected.
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