用于高密度封装的小间距楔焊

R. Short
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引用次数: 2

摘要

在今天的计算机中,高引脚数封装需要高性能,高密度的硅被利用。在提供这种设计的同时保持成本效益和高产量的装配过程是一个重大挑战。本文讨论了Unisys在591引脚栅格阵列封装中开发细间距(100/spl mu/m)铝楔键合的经验。根据经验和现有设备,封装采用银玻璃模具连接,并使用32/spl μ m铝线进行线接。芯片连接在现有能力范围内,但在100/spl亩/米间距上连接550多根电线构成了重大挑战。考虑到最大线对线间隙、层对层错配、线长度、粘接工具角度和基准,以提供最大的自动对准精度。采用装配试验车(ATV)对粘结头和封装进行了三维CAD建模。ATV设计用于匹配最坏情况的几何形状,并用于验证3D建模过程中开发的概念。该产品于1993年投入生产,装配产量已超过预期。虽然在单芯片封装上演示了细间距线键合,但该技术可用于多芯片应用。
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Fine Pitch Wedge Bonding for High Density Packaging
In today's computers, high pin count packages are required for the high performance, high density silicon being utilized. A significant challenge exists to provide such designs while maintaining a cost effective, high yielding assembly process. This paper discusses Unisys' experience in the development of fine pitch (100/spl mu/m) aluminum wedge bonding for a 591 Pin Grid Array package. Experience and available equipment dictated the package to be die attached using silver glass and wirebonded using 32/spl mu/m aluminum wire. Die attach was well within existing capabilities but the interconnect of over 550 wires on 100/spl mu/m pitch posed a significant challenge. Considerations were given to maximum wire to wire clearance, layer to layer misregistration, wire lengths, bonding tool angles, and fiducials that would provide maximum automatic alignment accuracy. Three dimensional CAD modeling of the bond head and package was followed with an Assembly Test Vehicle (ATV). The ATV was designed to match worst case geometries, and was used to verify concepts developed during 3D modeling. The product was introduced into production in 1993, and has exceeded predicted assembly yields. Although the fine pitch wire bonding was demonstrated on a single chip package, the technology is transportable to multichip applications.
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