室温下纳米结构的弹道输运

M. Margala
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In BDT, without biasing the lateral gates, we replicated the rectifying behavior shown in Fig. 2, certifying the presence of non-linear effect at room temperature. BDT is a unique planar device that possesses both a positive and a negative transconductance region and is capable of operating into the THz frequency regime at the room temperature. BDT is based upon an electron steering and a ballistic deflection effect. Modeling and experimental measurements have indicated that the transconductance of the device increases with applied drain-source voltage. The differential mode of operation provides two drain outputs, which depending on the gate bias, are either complementary or non-complementary. The latter facilitates a wide variety of circuit design techniques. The extremely low gate capacitance of the BDT planar structure contributes to THz performance. 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引用次数: 0

摘要

当电子器件的尺寸减小到电子平均自由程以下时,就会出现弹道输运。通过采用最新的制造技术和合适的材料体系,即使在室温下,纳米级器件也可以实现弹道性能。在[1]中,Song提出了一种弹道整流器,它展示了室温下的非线性输运。然而,该装置的功能仅限于整流。利用这一完善的理论,并将功能扩展到整流之外,我们的团队提出了一种新型器件,我们在其中添加了两个平面内战略性放置的门,如图1的SEM图像所示。这导致了弹道偏转晶体管(BDT)的形成[2]。在BDT中,在不偏置横向栅极的情况下,我们复制了如图2所示的整流行为,证明了室温下非线性效应的存在。BDT是一种独特的平面器件,具有正、负跨导区,能够在室温下工作在太赫兹频率范围内。BDT是基于电子转向和弹道偏转效应。模型和实验测量表明,该器件的跨导随外加漏源电压的增加而增加。差分工作模式提供两个漏极输出,这取决于栅极偏置,是互补的还是非互补的。后者促进了各种各样的电路设计技术。BDT平面结构极低的栅极电容有助于提高太赫兹性能。为了研究沿通道的栅极控制,我们只制造了BDT通道,其中我们去除左漏极、右漏极和偏转板,并以推挽方式偏置两个栅极,如图3(a)所示。在图3(b)中可以注意到漏极电流(ID)首先作为栅极电压(VLG)的函数增加,然后减小。这种行为是由于通道首先被掐断,然后随着VLG的增加,通道打开,然后最终再次掐断。当沟槽宽度(Wt)为150 nm时,沟槽宽度(WC)从200 nm增加到400 nm,最大和最小电流(ΔI)(图3(c))的差值从20.15 μA减小到15.26 μA,表明沟槽越窄,可以实现早期掐断。随着WC的增加,电流的增加归因于载流子浓度的增加。我们还观察到,当WC=200 nm时,随着沟槽的缩小,电流呈指数级上升。在这种情况下,异质结构界面处的场结构被改变,因为打破热离子势垒的能力变得更容易,栅极电流开始流入通道。另一种解释可以在制造的基础上给出,因为我们在蚀刻Wt为100,150和200nm时施加了相同的剂量,这使得更宽的沟槽更浅,从而导致更高的泄漏和低电流。通过在蚀刻区或更深的沟槽中掺杂p,可以减少泄漏,以避免可能的寄生电流。给出了BDT非与门和其他BDT门结构的测量结果。用bdt创建的2输入NAND门逻辑函数如图4所示,测量结果如图5所示[3]。准弹道状态下的结果进一步得到了由合成的BDT输出响应生成的经验模型的支持。此外,我们的蒙特卡罗分析报告了不同几何参数对传递特性的影响[4]。分析了InGaAs通道中栅极控制的强度。我们提出了不同的表面电荷密度模型来解释观察到的实验测量结果。最后,我们介绍了我们的时域光谱研究,用于成功地证明弹道纳米器件在室温下被皮秒电脉冲激发的太赫兹响应。
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Ballistic transport in nanostructures at room temperature
Ballistic transport appears when the size of electronic devices is reduced below the electron mean free path. By using latest fabrication techniques and proper material system, the ballistic behavior can be achieved in nano-scale devices even at room temperature. In [1], Song has presented a ballistic rectifier which demonstrates the nonlinear transport at room temperature. However, the functionality of this device was constraint to rectification only. Using this well established theory, and to extend the functionality beyond rectification, our group proposed a novel device in which we added two in-plane strategically placed gates as shown in SEM image in Fig. 1. This led to formation of ballistic deflector transistor (BDT) [2]. In BDT, without biasing the lateral gates, we replicated the rectifying behavior shown in Fig. 2, certifying the presence of non-linear effect at room temperature. BDT is a unique planar device that possesses both a positive and a negative transconductance region and is capable of operating into the THz frequency regime at the room temperature. BDT is based upon an electron steering and a ballistic deflection effect. Modeling and experimental measurements have indicated that the transconductance of the device increases with applied drain-source voltage. The differential mode of operation provides two drain outputs, which depending on the gate bias, are either complementary or non-complementary. The latter facilitates a wide variety of circuit design techniques. The extremely low gate capacitance of the BDT planar structure contributes to THz performance. To investigate the gate control along the channel we fabricated only the channel of BDT where we removed left drain, right drain and deflector, and bias two gates in push-pull fashion as shown in Fig. 3(a). It can be noticed in Fig. 3(b) that drain current (ID) first increases as a function of gate voltage (VLG) then decreases. This behavior is due to the fact that the channel first is being pinched off, then as the VLG is increased, the channel opens and then eventually it pinches off again. As the channel width (WC) increases from 200 nm to 400 nm for a trench width (Wt) of 150 nm, the difference in the maximum to minimum current (ΔI) (Fig. 3(c)) is reduced from 20.15 μA to 15.26 μA, which indicates that early pinch off can be achieved with narrower channel. Increase in current with WC is attributed to the increase in carrier concentration. It is also observed that for WC=200 nm, the current rises exponentially as we narrow down the trenches. In this case, the field structure is modified at the heterostructure interface as a result of the ability to break thermionic barrier becomes easier and the gate current starts flowing into the channel. Another explanation can be given on the basis of fabrication because we applied same dose while etching Wt of 100, 150 and 200 nm, which made the wider trenches shallower resulting into higher leakages and low currents. The leakage could be reduced by p-doping in the etched region or deeper trenches to avoid possible parasitic currents. Measured results from the fabrication of a BDT NAND gate and other BDT gate structures are presented. The 2-input NAND gate logic function created with BDTs is shown in Fig. 4 and the measured results are shown in Fig. 5 [3]. The results in the quasi-ballistic regime are further supported by an empirical model generated from a fabricated BDT output response. Furthermore, our Monte Carlo analysis reports on the effect of different geometry parameters on the transfer characteristics [4]. The strength of the gate control in the InGaAs channel is analyzed. We propose different models for the surface charge density to explain the observed experimental measurements. Finally, we present our time-domain spectroscopy studies used to successfully demonstrate a THz response of ballistic nanodevices at room temperature, excited by picosecond electrical pulses.
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