氮阱层性质对电荷阱快闪存储器中电荷质心位置的影响

Seunghyun Kim, Do-Bin Kim, Eunseon Yu, Sang-Ho Lee, Seongjae Cho, Byung-Gook Park
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引用次数: 0

摘要

本文研究了氮阱层性质对电荷阱闪存(CTF)存储器中电荷质心位置的影响。在CTF存储器的操作中,电荷通过薄氧化物隧道进入氮化层,而不像浮栅(FG)型闪存,电荷存储在导电多晶硅中。对捕获电荷分布的深入了解有助于建立CTF存储电池的精确紧凑模型,其中电荷质心成为一种非常实用的方法,通过这种方法可以更数学地将大量捕获电子作为整个电子云处理。分析了电荷质心与程序电压(Kpgm)随氮层性质的变化关系。
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Effects of nitride trap layer properties on location of charge centroid in charge-trap flash memory
In this study, the effects of nitride trap layer properties on location of charge centroid in charge-trap flash (CTF) memory are closely investigated. In the operations of CTF memories, charges tunnel into the nitride layer through thin oxide, unlike the floating-gate (FG) type flash memory where the charges are stored in the conductive poly-crystalline Si. Deeper understanding of distribution of the trapped charges should be beneficial in setting up an accurate compact model of CTF memory cell, where the charge centroid becomes a very practical means by which a rather large number of trapped electrons can be dealt in the more mathematical manner as a whole electron cloud. The relation between charge centroid and program voltage (Kpgm) depending on nitride layer properties is analytically studied.
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