一种用于片上测量的新型共面波导矢量网络分析仪

J. Bellantoni, R. Compton
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引用次数: 1

摘要

提出了一种新的共面波导网络分析仪系统,该系统是专门为毫米波器件和电路的片上表征而设计的。该分析仪完全采用共面波导制造,实现了大带宽,消除了除探头尖端接触外测试集与晶圆之间的所有不连续。该分析仪采用沿共面波导探头尖端对数间隔的探测二极管对信号进行采样,并采用六端口理论计算复散射参数。演示了一个15.7 ghz的原型分析仪。
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A new coplanar waveguide vector network analyzer for on-wafer measurements
A new coplanar-waveguide network analyzer system that is specifically designed for on-wafer characterization of millimeter-wave devices and circuits is presented. The analyzer is made entirely in coplanar-waveguide to achieve large bandwidths and eliminate all discontinuities between the test set and wafer except the probe tip contacts. The analyzer is made by spacing detector diodes logarithmically along the coplanar-waveguide probe-tip to sample the signal, and it uses six-port theory to calculate complex scattering parameters. A 15.7-GHz prototype analyzer has been demonstrated.<>
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