Periodic Microstructures Formation on Plastic Plate by Aerosol Beam Irradiation

Technology of periodic microstructures formation on plastic plate, the polyethylene terephthalate (PET) plate, was developed with an aerosol beam. The beam was composed of submicron-size anatase titania (TiO 2 ) particles. Formation mechanism depended on an incident angle of the beam to the PET plate. At an incident angles in the range of 0 to 30˚, a TiO 2 films were fabricated on the PET plate. Deposition rate of the film decreased as incident angle increased in the range of 0 to 30˚. The film was not produced at 40˚. At 50 and 60˚, the PET plate was etched by the beam irradiation. In the etching area, periodic microstructures were self-organized, whose grooves’ direction was perpendicular to the beam incidence direction.