{"title":"CaCu/sub 3/Ti/sub 4/O/sub 12/薄膜的介电性能","authors":"Kyuho Cho, N. Wu, A. Ignatiev, Jianren Li","doi":"10.1109/ISAF.2002.1195901","DOIUrl":null,"url":null,"abstract":"High dielectric CaCu/sub 3/Ti/sub 4/O/sub 12/ (CCTO) thin films were successfully grown on LaAlO/sub 3/(100) (LAO) crystalline substrates and on SrRuO/sub 3/(SRO) conductive films on LAO substrates by the pulsed laser deposition (PLD) method. Microstructure and dielectric properties of (001) oriented (CCTO) epitaxial thin films were evaluated, and compared to those of CCTO polycrystalline bulk samples by x-ray diffraction, DC conductivity and dielectric measurements. The gigantic dielectric constant of greater than 20,000 in polycrystalline CCTO can be accounted for by the internal barrier layer capacitance (IBLC) model. However, this model fails to explain the large dielectric constant behavior for epitaxial CCTO/SRO/LAO thin films which also show high DC conductivity. XPS analysis indicated that oxygen vacancies could be a possible factor responsible for the low resistivity of thin film.","PeriodicalId":415725,"journal":{"name":"Proceedings of the 13th IEEE International Symposium on Applications of Ferroelectrics, 2002. ISAF 2002.","volume":"47 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2002-05-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Dielectric properties of CaCu/sub 3/Ti/sub 4/O/sub 12/ thin films\",\"authors\":\"Kyuho Cho, N. Wu, A. Ignatiev, Jianren Li\",\"doi\":\"10.1109/ISAF.2002.1195901\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"High dielectric CaCu/sub 3/Ti/sub 4/O/sub 12/ (CCTO) thin films were successfully grown on LaAlO/sub 3/(100) (LAO) crystalline substrates and on SrRuO/sub 3/(SRO) conductive films on LAO substrates by the pulsed laser deposition (PLD) method. Microstructure and dielectric properties of (001) oriented (CCTO) epitaxial thin films were evaluated, and compared to those of CCTO polycrystalline bulk samples by x-ray diffraction, DC conductivity and dielectric measurements. The gigantic dielectric constant of greater than 20,000 in polycrystalline CCTO can be accounted for by the internal barrier layer capacitance (IBLC) model. However, this model fails to explain the large dielectric constant behavior for epitaxial CCTO/SRO/LAO thin films which also show high DC conductivity. XPS analysis indicated that oxygen vacancies could be a possible factor responsible for the low resistivity of thin film.\",\"PeriodicalId\":415725,\"journal\":{\"name\":\"Proceedings of the 13th IEEE International Symposium on Applications of Ferroelectrics, 2002. ISAF 2002.\",\"volume\":\"47 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2002-05-28\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Proceedings of the 13th IEEE International Symposium on Applications of Ferroelectrics, 2002. ISAF 2002.\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ISAF.2002.1195901\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings of the 13th IEEE International Symposium on Applications of Ferroelectrics, 2002. ISAF 2002.","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ISAF.2002.1195901","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Dielectric properties of CaCu/sub 3/Ti/sub 4/O/sub 12/ thin films
High dielectric CaCu/sub 3/Ti/sub 4/O/sub 12/ (CCTO) thin films were successfully grown on LaAlO/sub 3/(100) (LAO) crystalline substrates and on SrRuO/sub 3/(SRO) conductive films on LAO substrates by the pulsed laser deposition (PLD) method. Microstructure and dielectric properties of (001) oriented (CCTO) epitaxial thin films were evaluated, and compared to those of CCTO polycrystalline bulk samples by x-ray diffraction, DC conductivity and dielectric measurements. The gigantic dielectric constant of greater than 20,000 in polycrystalline CCTO can be accounted for by the internal barrier layer capacitance (IBLC) model. However, this model fails to explain the large dielectric constant behavior for epitaxial CCTO/SRO/LAO thin films which also show high DC conductivity. XPS analysis indicated that oxygen vacancies could be a possible factor responsible for the low resistivity of thin film.
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