机械应力电学表征用半导体弯曲装置

R. Bühler, A. Perin, R. Giacomini
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引用次数: 0

摘要

这项工作提出并详细描述了一个完整的解决方案,用于测试机械应力下的非封装电子器件。该设备经过了实施和校准,以便以后用于器件的电气特性,例如在受控机械应力下的mosfet和二极管。半导体弯曲设备允许使用实验室中已经存在的探针站的设备的电气特性,而无需额外的修改,如这里所示。
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Semiconductor bending setup for electrical characterization of mechanical stress
This work proposes and describes in details a complete setup solution for testing of non-encapsulated electronic devices under mechanical stress. The equipment was implemented and calibrated to later use in electrical characterization of devices, such as MOSFETs and diodes under controlled mechanical stress. The semiconductor bending equipment allows the electrical characterization of devices using already existent probe stations in laboratories without additional modifications, as presented here.
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