利用低成本聚合物微加工技术集成微流体通道和光波导

Digest of the LEOS Summer Topical Meetings Biophotonics/Optical Interconnects and VLSI Photonics/WBM Microcavities, 2004. Pub Date : 2004-06-28 DOI:10.1109/LEOSST.2004.1338655

Arnan Mitchell, A. Holland, Kaushal Vora, M. Ghantasala

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引用次数: 4

摘要

介绍了利用等离子体刻蚀和激光烧蚀技术实现硅集成生物光子芯片的最新进展。该芯片采用SU-8和UV-15聚合物材料薄膜。演示了一种交叉的光波导和微流体通道，在通道上具有良好的光传输。

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Integration of microfluidic channels and optical waveguides using low-cost polymer microfabrication techniques

Recent progress on the realization of a silicon integrated biophotonic chip using plasma etching and laser ablation is presented. The chip utilizes films of SU-8 and UV-15 polymer material. An intersecting optical waveguide and microfluidic channel exhibiting good optical transmission across the channel is demonstrated.

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Digest of the LEOS Summer Topical Meetings Biophotonics/Optical Interconnects and VLSI Photonics/WBM Microcavities, 2004.

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