高性能蓝宝石上硅亚波长光栅耦合器,波长2.7µm

Jingjing Zhang, Junbo Yang, Wenjun Wu, Hong-hui Jia, Shengli Chang
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引用次数: 1

摘要

耦合器是集成光电路的重要组成部分,对高效率紧凑型耦合器的需求很大。本文报道了波长为2.7μm的高效蓝宝石硅(SOS)光栅耦合器。从标准单模光纤到SOS波导的耦合效率为75%,刻蚀深度带宽(刻蚀高度公差)为50nm。提出了光栅耦合器的基本设计原理,并对提高耦合器耦合效率的结构进行了改进。利用时域有限差分法对TE极化下的光栅进行了仿真和设计。通过我们的优化设计,可以大大提高耦合效率,达到80%以上。光栅为中红外硅光子芯片开辟了道路,使新的非线性光学功能以及新的光谱实验室芯片方法成为可能。
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High performance silicon-on-sapphire subwavelength grating coupler for 2.7µm wavelength
Couplers are important parts in integrated optical circuit and high efficiency compact couplers are in great demand. We report on high-efficiency silicon-on-sapphire (SOS) grating couplers at wavelength of 2.7μm. A 75% coupling efficiency and 50nm etching depth bandwidth (the tolerance of etching height) from a standard single-mode fiber to an SOS waveguide is obtained. A basic design principle of the grating coupler is presented, and some improved structures to enhance the coupling efficiency are proposed and estimated. The FDTD method is utilized to simulate and design the grating operated under TE polarization. With our optimization design, the coupling efficiency can be largely increased and beyond 80%. The gratings open the path to silicon photonic chips for the mid-infrared enabling new nonlinear optical functions as well as new spectroscopic lab on-a chip approaches.
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